Spatial Light Modulator with Multiple Diffractor Arrays
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Solution Overview
Problem
Existing ribbon-type spatial light modulators suffer from thermal gradients due to concentrated laser power, leading to ribbon failure and reduced efficiency, particularly in applications like Computer Thermal Printing and maskless lithography, as the active ribbons deflect into a parabolic profile, limiting high contrast and efficiency modulation to a narrow region.
Innovation Solution
A monolithic integrated spatial light modulator assembly with multiple one-dimensional diffractor arrays, where electrostatically deflectable ribbons are supported by structures dividing them into regions to form diffractor arrays, and illumination optics are used to distribute light evenly across multiple arrays, reducing thermal gradients and extending the SLM's operating lifetime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If line illumination is used to illuminate a narrow region of the diffractor array, then high contrast and efficiency modulation is achieved in the illuminated region, but thermal gradients increase causing ribbon failure and reduced device lifetime
Solution Approach 1:
The single large diffractor array is divided into multiple smaller sub-arrays arranged in a grid pattern. Each sub-array can be independently illuminated, allowing the total optical power to be distributed across multiple regions rather than concentrated in a single line, thereby reducing thermal gradients while maintaining modulation efficiency
Solution Approach 2:
The system dynamically switches between multiple sub-arrays using a scanning mechanism. By sequentially activating different sub-arrays and allowing them to cool down between uses, the thermal load is distributed over time and space, preventing any single region from experiencing excessive thermal gradients that would cause ribbon failure
2Duration of action of stationary object
If illumination width is increased to cover more of the array, then device lifetime is extended by reducing thermal gradients, but the region of high contrast modulation decreases
Solution Approach 1:
The array is segmented into multiple sub-arrays that can be independently controlled. This allows the system to illuminate a broader area by activating multiple sub-arrays simultaneously or sequentially, distributing the thermal load while maintaining high contrast modulation in each active sub-array region
Solution Approach 2:
The scanning mechanism ensures continuous useful action by rapidly switching between sub-arrays. While each sub-array is used for a short time, the rapid switching creates the effect of continuous operation across the entire array, maintaining high modulation quality while distributing thermal stress to extend operating lifetime
3Duration of action of stationary object
If multiple diffractor arrays are used to distribute light, then thermal gradients are reduced and device lifetime is extended, but device complexity increases
Solution Approach 1:
The array is segmented into multiple identical sub-arrays arranged in a regular grid pattern. This segmentation approach, while increasing the number of elements, uses repetitive identical structures that can be manufactured and controlled more easily than a single complex array, and the regular pattern simplifies the scanning and illumination control logic
Solution Approach 2:
Each sub-array is designed to be functionally identical and interchangeable with the others. This universality means that the same illumination and control mechanisms can be used for all sub-arrays, reducing the complexity of control electronics and allowing any sub-array to replace another if needed, thereby extending device lifetime without proportionally increasing control complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively distributes light across multiple diffractor arrays, reducing thermal gradients and extending the operational life of the spatial light modulator by ensuring even illumination and parallel operation of the arrays, thereby maintaining high contrast and efficiency modulation across a broader area.
Implementation Method 1
spatial light modulators include an array of one or more devices that can control or modulate an incident beam of light in a spatial pattern that corresponds to an electrical input to the devices
Implementation Method 2
By displacing the active ribbons, relative to the static ribbons, a square-well diffraction grating is formed along the long axis of the array
Data Source
AI summary
A system including spatial light modulators with multiple one-dimensional (1D) diffractor arrays and methods of operating the same are provided. In one embodiment, the system comprises a spatial light modulator (SLM) assembly including a plurality of one-dimensional (1D) diffractor arrays to modulate light from a light source, the plurality of 1D diffractor arrays integrally formed on a die; illumination optics disposed in a light path between the plurality of 1D diffractor arrays and the light source to illuminate a substantially linear portion of at least one of the plurality of 1D diffractor arrays; and imaging optics disposed in a light path between the SLM assembly and an image plane on a target-substrate, the imaging optics adapted to transmit modulated light from the SLM assembly to a substantially linear portion of the image plane. Other embodiments are also provided.