Spatial Light Modulator Shared Support Stiffness
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In spatial light modulators, there is a trade-off between driving force and support stiffness due to competing requirements between electrodes and supports, which affects the efficiency and performance of light modulation.
Innovation Solution
A spatial light modulator design featuring a first and second light modulation element with movable portions supported by electrostatic forces and an electrode supporting portion that jointly supports both elements, allowing for improved support stiffness and driving efficiency by optimizing the placement and number of supports.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the number of supports is increased to improve support stiffness, then the support stiffness is improved, but the area available for electrodes is reduced, worsening the driving force and driving efficiency
Solution Approach 1:
The patent merges the support structures of adjacent light modulation elements by making them share common supports. Specifically, the support structure includes a substrate, a first support extending from the substrate to support a first movable portion, a second support extending from the substrate to support a second movable portion, and a common support extending from the substrate to support both the first and second movable portions. This merging reduces the total number of supports while maintaining adequate support stiffness, thereby preserving more area for electrodes and improving driving efficiency.
2Power
If the area of electrodes is increased to improve driving force, then the driving efficiency is improved, but the support stiffness is reduced due to fewer supports
Solution Approach 1:
The patent merges the support structures of adjacent light modulation elements by making them share common supports. Specifically, the support structure includes a substrate, a first support extending from the substrate to support a first movable portion, a second support extending from the substrate to support a second movable portion, and a common support extending from the substrate to support both the first and second movable portions. This merging reduces the total number of supports while maintaining adequate support stiffness, thereby preserving more area for electrodes and improving driving efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the support stiffness of the spatial light modulator while maintaining driving efficiency, improving the overall performance and light modulation capabilities.
Implementation Method 1
a top electrode which adsorbs the movable portion by the electrostatic force between the movable portion and the top electrode
Data Source
AI summary
A spatial light modulator comprises, a first light modulation element having a substrate, a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, a second light modulation element placed adjacent to the first light modulation element in the substrate, having a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, and electrode supporting portions commonly supporting the top electrodes of the first light modulation element and the second light modulation element relative to the substrate.