Spatial Light Modulator Silicon Grating LiDAR Beam Steering
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Solution Overview
Problem
Existing LiDAR devices face challenges with mechanical beam steering methods due to bulkiness, vibration, and noise, while non-mechanical methods struggle with light loss, necessitating an improvement in light efficiency for effective beam steering in advanced driving assistance systems and autonomous vehicles.
Innovation Solution
A spatial light modulator is designed with a first reflective layer, a resonance layer, and a second reflective layer featuring grating structures made of silicon with a low extinction coefficient, optimized through specific deposition processes and heat treatments, to enhance light modulation and reduce power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If mechanical beam steering method is used, then beam steering function is achieved, but device becomes bulky and generates vibration and noise
Solution Approach 1:
The patent replaces mechanical beam steering components (mirrors, lenses, motors) with a spatial light modulator that uses optical phase modulation. The SLM controls beam direction by varying the phase of light across different regions, eliminating mechanical moving parts and achieving compact, vibration-free operation.
Solution Approach 2:
The patent changes the operational parameter from mechanical position adjustment to optical phase modulation. By controlling the phase distribution of light through the SLM's pixel array, beam steering is achieved through electromagnetic field manipulation rather than physical movement, resolving the bulkiness issue.
2Device complexity
If non-mechanical beam steering method is used, then device compactness is improved, but light loss increases
Solution Approach 1:
The patent optimizes the extinction coefficient parameter of the silicon material in the SLM to reduce optical absorption losses. By carefully selecting and controlling the silicon layer properties, the patent minimizes light energy loss while maintaining the non-mechanical compact structure.
Solution Approach 2:
The patent employs composite material structures combining silicon with other materials having complementary optical properties. This composite approach allows optimization of both compactness and light transmission efficiency by leveraging the advantages of different materials.
3Ease of manufacture
If silicon material with high extinction coefficient is used, then manufacturing is easier, but light efficiency decreases
Solution Approach 1:
The patent changes the extinction coefficient parameter of the silicon material by controlling deposition conditions and heat treatment processes. This parameter optimization reduces optical absorption while maintaining manufacturability through standard semiconductor fabrication techniques.
Solution Approach 2:
The patent utilizes heat treatment processes to modify the crystalline structure and optical properties of the silicon material. Thermal processing optimizes the extinction coefficient and other material properties to achieve both ease of manufacture and high light efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The spatial light modulator achieves improved light efficiency and reduced power consumption, enabling effective beam steering with high directivity and low light loss, suitable for advanced driving assistance systems and LiDAR applications.
Implementation Method 1
a resonance layer on the first reflective layer
Implementation Method 2
a second reflective layer on the resonance layer, the second reflective layer including a plurality of grating structures spaced apart from each other
Implementation Method 3
a first reflective layer; a resonance layer on the first reflective layer; and a second reflective layer on the resonance layer
Data Source
AI summary
Provided is a spatial light modulator configured to modulate light, the spatial light modulator including a first reflective layer, a resonance layer on the first reflective layer, and a second reflective layer on the resonance layer, the second reflective layer including a plurality of grating structures space apart from each other, wherein the plurality of grating structures include silicon (Si) having an extinction coefficient k that is less than or equal to 1e-5 with respect to light in the predetermined wavelength band.