Spatial Light Modulator Void Structure for Thermal Crosstalk Isolation

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Solution Overview

Problem

Spatial light modulators experience thermal interference and increased power consumption due to heat generated in driven pixels affecting non-driven pixels, which impacts their operation and efficiency.

Innovation Solution

A spatial light modulator design featuring a void block layer with pillars supporting pixels, creating vacuum regions between the substrate and pixels, and trenches between adjacent pixels to reduce thermal interference and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If pixels are closely arranged on the substrate to increase pixel density, then the device area is reduced, but thermal interference between adjacent pixels increases

Engineering Contradiction:
Improvedevice areaVSAvoidthermal interference
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The device introduces isolation structures (trenches and void block layers) that segment the continuous substrate into isolated pixel regions. These structures physically divide the thermal pathways between adjacent pixels, allowing each pixel to be thermally independent while maintaining close spatial arrangement on the substrate.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The isolation structures act as thermal intermediaries or barriers between adjacent pixels. The trenches filled with low thermal conductivity material and the void block layer serve as mediating elements that block heat transfer from driven pixels to non-driven pixels, reducing thermal interference while maintaining device compactness.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If driving voltage is increased to improve phase modulation depth, then modulation efficiency is improved, but power consumption increases

Engineering Contradiction:
Improvephase modulation depthVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent converts the harmful thermal effect into a beneficial isolation mechanism. By introducing trenches and void block layers that thermally isolate pixels, the system reduces unwanted heat transfer to non-driven pixels. This thermal management enables more efficient use of driving power, as energy is concentrated in driven pixels rather than being wasted heating adjacent non-driven pixels, thereby reducing overall power consumption while maintaining modulation depth.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Object-affected harmful factors

If thermal isolation structures are added between pixels, then thermal interference is reduced, but device complexity increases

Engineering Contradiction:
Improvethermal crosstalkVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent employs a void block layer containing air voids or vacuum regions as the isolation medium. These porous/void structures provide effective thermal isolation since air and vacuum have very low thermal conductivity. The voids are integrated into the pixel support structure, combining thermal management functionality with mechanical support without adding separate complex isolation systems.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design minimizes thermal crosstalk and power consumption, enhancing the stability and efficiency of phase modulation, improving beam steering accuracy and reducing high-order beam intensity.

Implementation Method 1

a cavity layer disposed between the upper reflective layer and the lower reflective layer and having a refractive index that changes based on an electrical signal

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

void regions formed between the substrate and the plurality of pixels... substantially a vacuum

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentEP4585986A1Spatial light modulator, electronic apparatus including the spatial light modulator, and method of fabricating the spatial light modulator
Publication Date: 2025.07.16 SAMSUNG ELECTRONICS CO LTD
  • EP4585986A1 patent drawingFigure 1
  • EP4585986A1 patent drawingFigure 2
  • EP4585986A1 patent drawingFigure 3

AI summary

A spatial light modulator for modulating a phase of incident light and emitting phase-modulated light includes a substrate, a plurality of pixels, and a void block layer. Each pixel of the plurality of pixels includes an upper reflective layer, a lower reflective layer, and a cavity layer disposed between the upper reflective layer and the lower reflective layer and having a refractive index that changes based on an electrical signal. The void block layer includes a plurality of pillars supporting the plurality of pixels and separating the plurality of pixels from the substrate, and void regions formed between the substrate and the plurality of pixels.