Specimen Height Adjustment via Tilt-Angle Image Deviation
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Solution Overview
Problem
In surface analysis devices with eucentric specimen stages, the height of the specimen must be adjusted frequently, requiring a method to accurately and easily adjust the specimen height to maintain alignment with the tilt axis and optical axis, especially when specimens are replaced.
Innovation Solution
A surface analysis device and method that utilize a control section to acquire and process specimen images at different tilt angles, calculate deviation from a reference height by generating partial images and measuring shift amounts, and adjust the specimen stage to align the specimen surface accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual height adjustment is used, then the device structure remains simple, but the adjustment time increases and precision decreases
Solution Approach 1:
The patent replaces manual mechanical adjustment with an automated optical measurement and control system. The control section captures images at different tilt angles, calculates deviation amounts through image processing, and automatically controls the height adjustment mechanism, substituting manual mechanical operations with an integrated optical-mechanical control system that achieves both high precision and efficiency
Solution Approach 2:
The system performs self-adjustment by automatically capturing its own specimen images, processing the images to calculate height deviation, and controlling its own height adjustment mechanism without external intervention. The control section executes the entire height adjustment process autonomously based on image analysis results
2Measurement precision
If multiple images are captured and processed, then height adjustment precision improves, but the processing complexity increases
Solution Approach 1:
The patent divides the height measurement task into multiple independent image captures at different tilt angles. By capturing at least two images with different tilt angles and processing them separately to calculate individual deviation amounts, then determining the median value, the system achieves high measurement precision while keeping each processing step relatively simple and modular
Solution Approach 2:
The system uses image feedback to automatically determine specimen height deviation. The control section captures images, processes them to calculate deviation amounts, and uses this feedback information to control the height adjustment mechanism, creating a closed-loop system that eliminates the need for complex manual measurement procedures
Data Source
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AI summary
A surface analysis device (100) includes a specimen stage (50) and a control section (80), and the control section (80) executes specimen image acquisition processing for obtaining a first specimen image captured with a first tilt angle of a specimen (S) and a second specimen image captured with a second tilt angle of the specimen (S), deviation amount calculation processing for calculating an amount of deviation of a specimen surface from a reference height based on the first specimen image and the second specimen image, and height control processing for controlling the specimen stage (50) based on the amount of deviation of the specimen surface. In the deviation amount calculation processing, a plurality of first partial images are generated by cutting out a plurality of areas from the first specimen image, a plurality of second partial images are generated by cutting out a plurality of areas corresponding to the plurality of areas cut out from the first specimen image, from the second specimen image, and the amount of deviation of the specimen surface is calculated by measuring respective shift amounts between corresponding images of the plurality of first partial images and the plurality of second partial images.