Specimen Holder Movement Mechanism for Multi-Specimen TEM Observation
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Solution Overview
Problem
Current specimen holders for Transmission Electron Microscopes (TEM) and Scanning Transmission Electron Microscopes (STEM) lack the ability to mount multiple specimens, including a standard adjustment specimen for aberration correction, while allowing Beta angle inclination, without compromising vacuum integrity and resolution performance.
Innovation Solution
A specimen holder with a movement mechanism that enables precise control along the X-axis, allowing multiple specimens to be mounted and switched without disturbing the microscope's movement, using a combination of linear actuators and piezoelectric elements to maintain high precision and mechanical stability, and accommodate Beta angle inclination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple specimens are mounted in one specimen holder to reduce replacement frequency, then productivity is improved, but vacuum level deteriorates due to repeated airlock pumping
Solution Approach 1:
The specimen holder is divided into multiple independent specimen mounting positions (first, second, third positions) along the X-axis, allowing multiple specimens to be loaded simultaneously. This segmentation enables switching between specimens without removing the holder from the vacuum environment, thus maintaining vacuum integrity while improving productivity.
2Adaptability or versatility
If specimen holder movement mechanism is added to enable multiple specimen selection, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical movement mechanisms with a simpler system using piezoelectric elements for fine positioning and a push-back mechanism using elastic force. This substitution reduces mechanical complexity while maintaining the ability to switch between multiple specimens mounted at different positions.
Solution Approach 2:
Multiple specimens are arranged along the X-axis dimension rather than requiring complex three-dimensional movement. The push-back mechanism moves specimens along this single axis, simplifying the overall system architecture while providing multi-specimen capability.
3Manufacturing precision
If linear actuator and piezoelectric elements are used for precise positioning, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The patent combines linear actuators for coarse positioning with piezoelectric elements for fine positioning into a single integrated system. This merging allows the system to achieve high manufacturing precision through coordinated action of both mechanisms while sharing common structural elements and control systems.
Solution Approach 2:
The linear actuator performs preliminary coarse positioning of specimens to the general observation area, after which piezoelectric elements perform fine adjustments for precise positioning at the optical axis. This preliminary action divides the positioning task into stages, improving overall precision while optimizing the use of each mechanism.
4Ease of operation
If push-back mechanism using elastic force is implemented, then ease of operation is improved, but reliability may worsen due to force control
Solution Approach 1:
The push-back mechanism uses elastic force from a spring or elastic element to automatically return the specimen holder to its initial position after a specimen has been moved to the observation area. This self-service mechanism eliminates the need for complex active control systems while maintaining reliable and repeatable positioning through passive elastic recovery.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous observation and aberration correction with multiple specimens, maintaining vacuum integrity and resolution performance by allowing precise specimen positioning and switching without affecting the microscope's existing movement controls.
Implementation Method 1
a piezoelectric element arranged in the handle portion (5) of the specimen holder (3)
Data Source
AI summary
It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at the same time, thereby observing each specimens. The present invention is a specimen holder having a specimen holder movement mechanism for driving the specimen holder, wherein the specimen holder movement mechanism makes it possible to move the specimen holder approximately along the longer side of the specimen holder. In a preferred embodiment of the specimen holder according to the present invention, the specimen holder is characterized in that the specimen holder movement mechanism makes it possible to vary an insertion depth of the specimen holder into a tube for holding the specimen holder, with no relation to another specimen holder movement mechanism set for driving the specimen holder approximately along the longer side of the specimen holder.