Specimen Preparation Device Tilted Plate Ion Beam Contamination
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Solution Overview
Problem
Existing specimen preparation devices using ion beams often contaminate the specimen surface due to ion beam exposure to the vacuum chamber's inner bottom surface, making it difficult to observe both the cross section and surface of a single specimen effectively.
Innovation Solution
A specimen preparation device with a tilted plate positioned downstream of the specimen to intercept the ion beam, preventing it from hitting the vacuum chamber's inner bottom surface, and allowing the sputtered material to either avoid the specimen or adhere to it intentionally for forming a protective film, using materials like diamond or graphite for the incidence surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the ion beam is applied to the specimen in a vacuum chamber, then the cross section of the specimen can be prepared by ion beam milling, but the ion beam may hit the inner bottom surface of the vacuum chamber causing sputtering and contamination of the specimen surface
Solution Approach 1:
A tilted plate is introduced as an intermediary component between the ion beam path and the vacuum chamber's inner bottom surface. This plate intercepts the ion beam before it can reach the chamber surface, preventing sputtering and subsequent contamination of the specimen. The tilted plate serves as a mediator that protects the system from the harmful interaction between the ion beam and chamber surfaces.
Solution Approach 2:
The solution introduces a spatial dimension by positioning a tilted plate at an angle in the ion beam path. Instead of simply blocking the beam horizontally, the tilted plate uses angular orientation to intercept scattered ions and redirect them away from the vacuum chamber bottom surface, effectively using three-dimensional spatial arrangement to solve the contamination problem.
2Adaptability or versatility
If the ion beam is applied to mill the specimen, then the cross section can be observed, but the surface of the specimen cannot be observed due to contamination
Solution Approach 1:
The tilted plate acts as a protective intermediary that selectively shields the specimen surface from ion beam-induced contamination while allowing the cross-section preparation to proceed. This enables the specimen to maintain a clean surface for observation while still achieving the desired cross-sectional structure.
Solution Approach 2:
The specimen preparation process is segmented into two distinct functional zones: one for cross-section milling and another for surface protection. The tilted plate creates a spatial separation where the ion beam can effectively mill the cross-section while a protected zone maintains the surface integrity for subsequent observation.
3Reliability
If the inner bottom surface of the vacuum chamber is sputtered by the ion beam, then material is deposited on the specimen surface, but this contamination makes observation and analysis difficult
Solution Approach 1:
The tilted plate provides preliminary protection by intercepting the ion beam before it can reach the vacuum chamber's inner bottom surface. This preventive measure stops the sputtering process at its source, preventing the deposition of chamber materials onto the specimen surface and maintaining specimen integrity throughout the milling process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces contamination by minimizing ion beam exposure to the vacuum chamber's inner surfaces and allows for the formation of protective films on the specimen, enabling clear observation and analysis of both cross sections and surfaces.
Implementation Method 1
an ion beam generator 10 that generates an ion beam
Implementation Method 2
the inner bottom surface 8 of the vacuum chamber is sputtered, and the material that forms the inner bottom surface 8 of the vacuum chamber adheres to a surface 2a
Implementation Method 3
a tilted plate 60 that is placed to intersect a path of the ion beam on a downstream side of the specimen 2
Implementation Method 4
the inner bottom surface 8 of the vacuum chamber is sputtered, and the material that forms the inner bottom surface 8 of the vacuum chamber adheres to a surface 2a
Implementation Method 5
the material that forms the inner bottom surface 8 of the vacuum chamber adheres to a surface 2a (i.e., the surface of the specimen 2 opposite to the surface on which the shield plate 6 is placed) of the specimen 2
Data Source
Figure 1
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AI summary
A specimen preparation device (100) prepares a cross section of a specimen (2) by applying an ion beam, the specimen preparation device including: an ion beam generator (10) that generates the ion beam; a specimen holder (20) that holds the specimen (2); a shield plate (30) that shields part of the specimen from the ion beam; and a tilted plate (60) that is placed to intersect a path of the ion beam on a downstream side of the specimen (2), and has an incidence surface that is tilted relative to a direction in which the ion beam is incident.