Specimen Support for Cross-Platform Optical and Electron Microscopy

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Solution Overview

Problem

There is no established method for observing the same specimen under both an optical microscope and a transmission electron microscope, limiting the correlation and comparison of data between these two microscopy techniques.

Innovation Solution

An observation method and specimen support system are developed, allowing a specimen to be placed on a silicon nitride or carbon film-supported substrate with fiducial markers, enabling easy transfer between optical and transmission electron microscopes using retainer holding bases and moving mechanisms, with a control unit for precise positioning and error correction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a common specimen holder is used for both optical and electron microscopes, then correlation between observations is improved, but no established method exists for transmission electron microscopy observation

Engineering Contradiction:
Improvecompatibility between microscopesVSAvoidobservation capability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The specimen holder is designed with a universal interface that can be attached to both optical microscope stages and transmission electron microscope specimen holders, enabling the same holder to function in both microscopy systems. This multi-functionality allows seamless transition and correlation between optical and electron microscopy observations of the same specimen.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of operation

If the specimen is moved by the first moving mechanism, then positioning flexibility is improved, but position coordinate errors occur

Engineering Contradiction:
Improvepositioning flexibilityVSAvoidposition coordinate accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The system incorporates feedback through error correction information that is measured and stored when the specimen is moved by the first moving mechanism. The control unit uses this feedback to correct position coordinate errors, ensuring accurate positioning while maintaining the flexibility of movement.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The error correction information is obtained and stored in advance through preliminary movements of the specimen. This preliminary action allows the system to pre-calculate correction values that will be applied during subsequent positioning operations, ensuring both flexibility and precision.

Inventive Principle:
Principle #10Preliminary action

3Area of stationary object

If the observable region is enlarged, then larger specimens can be observed, but positioning precision may be compromised

Engineering Contradiction:
Improveobservable region sizeVSAvoidpositioning precision
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The control unit uses feedback from error correction information to maintain positioning precision across the enlarged observable region. By continuously correcting position coordinates based on predetermined error patterns, the system achieves both large observation area and high positioning accuracy.

Inventive Principle:
Principle #23Feedback

Data Source

PatentEP3570086B1Observation method and specimen support
Publication Date: 2023.01.04 JEOL LTD
  • EP3570086B1 patent drawingFigure 1~2
  • EP3570086B1 patent drawingFigure 3~5
  • EP3570086B1 patent drawingFigure 6~7

AI summary

An observation method includes placing a specimen on a specimen supporting film (104) of a specimen support (100), attaching the specimen support to a retainer (200), attaching the retainer to an optical microscope retainer holding base (300), attaching the optical microscope retainer holding base (300) to a specimen stage of an optical microscope and observing the specimen under the optical microscope, attaching the retainer (300) to a transmission electron microscope retainer holding base (400), and loading the transmission electron microscope retainer holding base (400) into a transmission electron microscope and observing the specimen under the transmission electron microscope.