Spectral Filter With Patterned Cavities For Chip Integration
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Solution Overview
Problem
Existing image sensors with spectral filters divide wavelength bands into only three sections (red, green, and blue), which limits color expression accuracy and object recognition performance, and current spectral filters are often bulky and complex, with ongoing research needed for integration on semiconductor chips.
Innovation Solution
A spectral filter design featuring a first and second metal reflection layer with cavities and bandpass filters that transmit light of different wavelength regions, where each cavity has multiple central wavelengths, allowing for improved wavelength separation and integration on a semiconductor chip.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If spectral filters are integrated on semiconductor chips, then device complexity is reduced and manufacturing is simplified, but manufacturing precision requirements increase
Solution Approach 1:
The patent changes the critical parameter from cavity thickness to cavity volume by introducing patterns (lines, dots, or combinations) within the cavities. This allows spectral filtering functionality to be achieved through in-plane pattern geometry rather than precise out-of-plane thickness control, significantly reducing manufacturing precision requirements while maintaining device integration benefits
Solution Approach 2:
The patent segments each cavity into multiple patterned regions (e.g., multiple lines or dots) within the cavity structure. This segmentation enables precise control of effective refractive index and spectral response through pattern geometry and arrangement, allowing complex spectral filtering functions to be achieved through simple planar fabrication processes
2Measurement precision
If wavelength bands are divided into more sections, then color expression accuracy and object recognition performance improve, but device complexity increases
Solution Approach 1:
The patent creates a universal cavity structure that can achieve multiple spectral filtering functions through pattern configuration rather than requiring separate structures for each wavelength band. By adjusting pattern geometry, arrangement, and materials within the same cavity framework, the system can selectively filter any wavelength region (UV, visible, infrared) without increasing overall device complexity
Solution Approach 2:
The patent transitions from controlling spectral response through the vertical dimension (cavity thickness) to the horizontal dimension (pattern geometry and arrangement within cavities). This dimensional shift enables multiple wavelength band divisions to be achieved through in-plane pattern design, avoiding the need for stacked complex structures and maintaining device simplicity while improving wavelength discrimination precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances color expression accuracy and object recognition performance by allowing for more precise wavelength division, simplifying the manufacturing process, and enabling integration on semiconductor chips, thus improving image sensor technology.
Implementation Method 1
a resonator structure (80) arranged on the pixel array (4100)... each of the plurality of pixels (4100) corresponds to one filter (451, 452, 453)... a spectral filter (420, 430, 440, 451, 452, 453)
Implementation Method 2
a bandpass filter (450) arranged above the resonator structure (80)... including a plurality of filters (451, 452, 453) transmitting light in a plurality of wavelength regions
Data Source
AI summary
Provided is a spectral filter, and an image sensor and an electronic device each including the spectral filter. The spectral filter includes a first metal reflection layer and a second metal reflection layer spaced apart from each other, a plurality of cavities disposed between the first metal reflection layer and the second metal reflection layer, and a bandpass filter disposed between the plurality of cavities and selectively transmitting light of a certain wavelength region. Each of the plurality of cavities may have a multi-mode structure having a plurality of central wavelengths.