Spectral Gap Coating for Accurate Sample Edge Detection
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Solution Overview
Problem
Existing image inspection apparatuses face challenges in accurately detecting the edges of samples with varying optical features due to low contrast in images, leading to incorrect sample positioning and inspection errors.
Innovation Solution
Applying a first coating to the gap area between the sample and the sample holder that reflects specific wavelengths with distinct brightness levels, and using a wavelength-dependent optical detector to image the light in multiple color channels for enhanced edge detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional imaging methods are used to detect sample edges, then the system structure remains simple, but the edge detection accuracy deteriorates due to low image contrast
Solution Approach 1:
A reference surface with known optical properties is introduced as an intermediary element between the light source and the sample. This reference surface provides stable reference signals that mediate the edge detection process, enabling accurate detection without requiring complex modifications to the overall imaging system structure
Solution Approach 2:
The patent utilizes wavelength-dependent optical detection to capture images in multiple color channels. By detecting light at different wavelengths, the system enhances the contrast between the sample edge and the background, improving edge detection accuracy through spectral differentiation rather than structural complexity
2Manufacturing precision
If samples with varying optical features are inspected using conventional methods, then the inspection process remains simple, but the positioning accuracy deteriorates due to incorrect edge detection
Solution Approach 1:
The patent applies local quality enhancement by using a reference surface with specific optical properties at the gap area between the sample and holder. This localized treatment creates high-contrast reference signals precisely where needed for positioning, without requiring complex processing of the entire sample area
Solution Approach 2:
The reference surface is prepared in advance with known optical characteristics before the inspection process begins. This preliminary preparation provides stable reference signals that simplify the positioning operation, as the system can rely on pre-established reference patterns rather than performing complex real-time analysis
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves the accuracy of sample edge detection by increasing contrast and consistency, allowing for precise sample positioning and higher-quality inspection results.
Implementation Method 1
the gap area is coated with a first coating configured to reflect a first wavelength of light with first brightness and to reflect a second wavelength of the light with second brightness
Implementation Method 2
an optical detector configured to image the light reflected off the gap area
Data Source
AI summary
Systems, apparatuses, and methods for detecting a location of a positioned sample may include an electrostatic holder configured to hold a sample and form a gap area between an outside edge of the sample and a structure of the electrostatic holder when the electrostatic holder holds the sample, wherein the gap area is coated with a first coating configured to reflect a first wavelength of light with first brightness and to reflect a second wavelength of the light with second brightness, the first wavelength is within a predetermined range of wavelengths, the second wavelength is outside the predetermined range of wavelengths, and the first brightness is higher than the second brightness; a light source configured to direct the light at the gap area; and an optical detector configured to image the light reflected off the gap area.