Semiconductor Thin Film Spectral Noise Attenuation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for measuring semiconductor thin film characteristics, such as thickness and Optical Critical Dimension (OCD), are hindered by noise in measurement spectra, which affects the accuracy of regression analysis models.
Innovation Solution
An analysis apparatus and method that includes a spectrum assembly to acquire and correct spectral noise and uncertainty, using a combination of machine learning and physical models to attenuate noise and improve measurement precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If regression analysis is performed using measurement spectrum, then thin film thickness and OCD can be measured, but measurement precision is degraded due to noise in the spectrum
Solution Approach 1:
The patent applies preliminary action by performing noise attenuation and uncertainty correction on the measurement spectrum before regression analysis. The system evaluates uncertainty of measurement parameters and attenuates spectral noise in advance, so that when regression analysis is performed, the data is already cleaned and corrected, improving measurement precision without requiring changes to the regression analysis method itself
Solution Approach 2:
The patent introduces an intermediary processing step between spectrum acquisition and regression analysis. This intermediary includes uncertainty evaluation and noise attenuation processes that act as a mediator to clean the spectral data before it is used for measurement, thereby isolating the regression analysis from the harmful effects of spectral noise
Data Source
AI summary
An analyzing apparatus is provided. The analyzing apparatus may include a spectrum unit acquiring a spectrum related to semiconductor characteristics, and a corrector provided with a model that corrects at least one of noise and uncertainty of a measurement parameter related to the spectrum. The analyzing apparatus may include an evaluator provided to evaluate the uncertainty of the parameter corresponding to a controllable factor of measurement equipment that outputs the spectrum, and an attenuator provided to attenuate the spectral noise on the basis of an uncontrollable factor of the measurement equipment.