Spectral Reflectance System Automatic Focus Control

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Solution Overview

Problem

Current spectral reflectance systems lack accurate control for focusing, leading to suboptimal signal strength and material property determination in surface characterization across various industries.

Innovation Solution

A spectral reflectance system with an optical director and a focusing system that automatically adjusts the position of the optical director to maximize signal strength by controlling the light source and detector alignment, ensuring optimal focus on the sample.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual focusing control is used in spectral reflectance systems, then device complexity is reduced, but measurement precision deteriorates due to suboptimal signal strength

Engineering Contradiction:
Improvematerial property determination accuracyVSAvoidfocusing system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system performs self-focusing by automatically adjusting the optical director position to maximize signal strength at the detector, eliminating the need for manual operator intervention and ensuring optimal focus conditions are consistently achieved

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The focusing system uses feedback from the detector signal strength to automatically adjust the optical director position, creating a closed-loop control system that continuously optimizes focus conditions based on real-time signal measurements

Inventive Principle:
Principle #23Feedback

2Measurement precision

If automatic focusing is implemented to maximize signal strength, then measurement precision improves, but device complexity increases

Engineering Contradiction:
Improvesignal strength optimizationVSAvoidfocusing system structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The optical director serves multiple functions: it directs light from the source to the sample, directs reflected light to the detector, and acts as the focusing element whose position is adjusted to optimize signal strength, eliminating the need for separate focusing components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The focusing function is merged with the optical director component rather than being implemented through a separate focusing mechanism, simplifying the overall system architecture while achieving automatic focus optimization

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise control of focus, maximizing signal strength and improving the accuracy of material property determination through enhanced spectral reflectance data collection.

Implementation Method 1

an optical director positioned in the optical path between the light source and the platform. The optical director couples light from the light source to the platform

Methodology Applied
Scientific EffectLight coupling and optical direction: Reflection

Implementation Method 2

a detector positioned to receive reflected light from the sample. The detector generates a signal representing the reflected light

Methodology Applied
Scientific EffectLight detection and signal generation: Photoelectric Effect

Implementation Method 3

a focusing system coupled to the optical director. In response to the signal the focusing system automatically focuses the light on the sample by controlling a position of the optical director

Methodology Applied
Scientific EffectOptical focusing: Focusing

Data Source

PatentUS10724900B2Determining focus condition in spectral reflectance system
Publication Date: 2020.07.28 KLA CORP
  • US10724900B2 patent drawing
  • US10724900B2 patent drawing

AI summary

Embodiments include a spectral reflectance system comprising a light source. The system includes a platform configured to retain a sample. The system includes an optical director positioned in the optical path between the light source and the platform. The optical director couples light from the light source to the platform. The system includes a detector positioned to receive reflected light from the sample. The detector generates a signal representing the reflected light. The system includes a focusing system coupled to the optical director. In response to the signal the focusing system automatically focuses the light on the sample by controlling a position of the optical director to maximize a strength of the signal.