Particle Spectrometer Deflector Arrangement for High Resolution

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Solution Overview

Problem

Existing particle spectrometers face challenges in achieving high energy and angular resolution due to limitations in sample manipulation and cooling, leading to distorted angular scales and reduced energy resolution, especially when analyzing particles emitted at angles other than perpendicular to the lens axis.

Innovation Solution

A method involving double deflection of the particle beam in orthogonal directions before entering the measurement region, allowing control of both position and direction, and a compact analyser arrangement with integrated deflectors to guide particles parallel to the lens axis, reducing the need for complex sample manipulation and enabling efficient cooling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a hemispherical analyser arrangement is used to analyse particle energies, then energy resolution can be achieved, but the arrangement only accepts particles emitted within a limited angular range perpendicular to the lens axis, requiring complex sample manipulation

Engineering Contradiction:
Improveenergy resolutionVSAvoidsample manipulation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical sample manipulation system with an electromagnetic deflection system. Instead of physically moving the sample to change emission angles, electromagnetic deflectors are used to bend the trajectories of emitted particles, redirecting them into the hemispherical analyser's acceptance angle. This substitution eliminates the need for complex mechanical manipulators while maintaining the ability to study particles emitted at various angles.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces electromagnetic deflectors as intermediary elements between the particle source and the hemispherical analyser. These deflectors act as mediators that transform particles emitted at various angles into a unified beam direction that matches the analyser's acceptance requirements. The deflectors convert angular information into spatial positioning, allowing the analyser to receive particles from a broader angular range without mechanical sample movement.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the sample is cooled to very low temperatures to achieve desired energy resolution, then thermal broadening is reduced, but the sample must be mounted on a manipulator with six degrees of freedom, increasing device complexity

Engineering Contradiction:
Improveenergy resolutionVSAvoidmanipulator complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent eliminates the six-degree-of-freedom manipulator by replacing mechanical angular adjustment with electromagnetic deflection. The sample can be fixed in position while cooled to low temperatures, and the electromagnetic deflectors perform the function of angular scanning that previously required complex mechanical movement. This reduces manipulator complexity while maintaining energy resolution through cryogenic cooling.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If particles are emitted at angles other than perpendicular to the lens axis, then larger angular ranges can be studied, but the angular scale becomes distorted and energy resolution deteriorates

Engineering Contradiction:
Improveangular rangeVSAvoidangular resolution
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent uses electromagnetic deflectors to correct the angular scale distortion that occurs when particles are emitted at non-perpendicular angles. Instead of directly analysing particles at various angles (which causes distortion), the deflectors first redirect these particles to perpendicular trajectories, ensuring that the hemispherical analyser receives particles with correct angular relationships. This maintains angular resolution while enabling study of larger angular ranges.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the trajectory parameters of emitted particles using electromagnetic fields. By applying deflection fields, the system transforms particles with various emission angles into a standardized perpendicular trajectory before analysis. This parameter transformation preserves the angular information while correcting the distortion, allowing accurate angular resolution to be maintained even when studying particles emitted at various angles.

Inventive Principle:
Principle #35Parameter changes

4Measurement precision

If a narrow entrance slit is used in the hemispherical analyser, then energy resolution is improved, but the angular acceptance is reduced, requiring even more precise sample positioning

Engineering Contradiction:
Improveenergy resolutionVSAvoidsample positioning precision
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent replaces the need for precise mechanical sample positioning with electromagnetic deflection control. The narrow entrance slit can be maintained for high energy resolution, and the electromagnetic deflectors ensure that particles from various angles are correctly directed into the slit. This eliminates the requirement for high-precision mechanical positioning while maintaining both narrow slit benefits and broad angular acceptance.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances energy resolution to approximately 0.7 meV and maintains angular resolution, while allowing larger angular ranges to be studied with maintained intensity and reduced costs by eliminating the need for complex sample movement and improving cooling efficiency.

Implementation Method 1

a lens system having a substantially straight optical axis; deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens system before entrance of the particle beam into the measurement region

Methodology Applied
Scientific EffectElectrostatic lens: Electrostatic Lens

Implementation Method 2

deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens system before entrance of the particle beam into the measurement region, and detecting the positions of said charged particles in said measurement region

Methodology Applied
Scientific EffectElectrostatic deflection: Electric Field

Implementation Method 3

The hemispheres 5 disperse the electrons with respect to their energy along the y-direction in the detector plane (which coincide with the plane of entrance 8 of the measurement region 3 in the hemispherical analyser arrangement)

Methodology Applied
Scientific EffectElectrostatic field: Electric Field

Implementation Method 4

a photo-electron spectrometer of hemispherical deflector type, a central component is the measurement region 3 in which the energies of the electrons are analysed

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP3428953B1Analyser arrangement for particle spectrometer
Publication Date: 2025.09.17 SCIENTA OMICRON AB
  • EP3428953B1 patent drawingFigure 1
  • EP3428953B1 patent drawingFigure 2
  • EP3428953B1 patent drawingFigure 3

AI summary

The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.