Spectroscopic Sensor Cavity Layer Fabrication via Handle Substrate Etching
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Solution Overview
Problem
The existing method for manufacturing spectroscopic sensors is prone to reliability issues due to the difficulty in achieving high precision in forming cavity layers and the risk of damaging the light-detecting substrate during the nanoimprint process.
Innovation Solution
A method involving the formation of a cavity layer by etching a surface layer on a handle substrate, followed by the creation of mirror layers on the light-transmitting substrate side, and then joining the light-detecting substrate, which prevents damage to the light-detecting substrate and ensures high precision and reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the cavity layer is formed by nanoimprint process on the mirror layer formed on the light-detecting substrate, then the spectroscopic sensor can be manufactured with integrated structure, but the manufacturing precision of the cavity layer deteriorates due to surface irregularities from light-receiving units and wiring layers
Solution Approach 1:
The manufacturing process is segmented into distinct stages: first forming the cavity layer pattern on the light-detecting substrate, then forming the mirror layer separately, and finally joining them together. This segmentation allows each layer to be optimized independently, preventing surface irregularities from affecting the other layer's precision.
Solution Approach 2:
The cavity layer pattern is formed preliminarily on the light-detecting substrate before the mirror layer is formed. This preliminary action establishes the precise cavity structure in advance, so that subsequent mirror layer formation does not compromise the already-established precision of the cavity layer.
2Ease of manufacture
If the mirror layers and cavity layer are stacked on the light-detecting substrate, then the interference filter unit can be formed, but the light-detecting substrate is likely to be damaged during the forming processes
Solution Approach 1:
The cavity layer pattern is formed preliminarily on the light-detecting substrate using a gentle process that does not damage the substrate. Then the mirror layer is formed separately and joined later, avoiding harsh processing conditions that could damage the light-detecting substrate.
Solution Approach 2:
The mirror layer acts as an intermediary element that is formed separately and then joined to the light-detecting substrate. This separation allows the cavity layer to be formed without direct exposure to harsh mirror layer formation processes, protecting the light-detecting substrate from damage.
3Manufacturing precision
If the cavity layer is formed by etching a surface layer on a handle substrate, then the manufacturing precision of the cavity layer is improved, but additional process steps are required
Solution Approach 1:
The cavity layer formation process is extracted from the light-detecting substrate and performed separately on a handle substrate. This extraction allows the use of precise etching methods without the constraints of the light-detecting substrate, achieving higher precision while the handle substrate serves as a temporary support that can be removed later.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the formation of high-quality cavity layers and prevents substrate damage, resulting in a highly reliable spectroscopic sensor with improved precision and cost-effectiveness.
Implementation Method 1
an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof
Implementation Method 2
a light-detecting substrate for detecting the light transmitted through the interference filter unit
Data Source
AI summary
A method for manufacturing a spectroscopic sensor 1 comprises a first step of forming a cavity layer 21 by etching a surface layer disposed on a handle substrate, a second step of forming a first mirror layer 22 on the cavity layer 21 after the first step, a third step of joining a light-transmitting substrate 3 onto the first mirror layer 22 after the second step, a fourth step of removing the handle substrate from the cavity layer 21 after the third step, a fifth step of forming a second mirror layer 23 on the cavity layer 21 devoid of the handle substrate after the fourth step, and a sixth step of joining a light-detecting substrate 4 onto the second mirror layer after the fifth step.