Spectroscopic Wavelength Correction With Movable Pixel Detection
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Solution Overview
Problem
As semiconductor dimensions reduce, precise metrology techniques are needed to prevent fabrication accidents, simplify the process, reduce development time, and lower production costs, especially for semiconductor memory devices requiring in-line monitoring.
Innovation Solution
A spectroscopic device with a light source part, diffraction part, detection part, and analyzing part, including a main light source and auxiliary light sources, is used to emit, diffract, and detect light to correct wavelengths and control resolution per pixel, enabling precise measurement of semiconductor structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single light source is used for spectroscopic measurement, then the device structure is simple, but the wavelength correction precision is insufficient
Solution Approach 1:
The light source is divided into a main light source and multiple auxiliary light sources with different wavelengths. Each auxiliary light source serves as an independent reference for wavelength correction at specific wavelength ranges, enabling precise wavelength calibration without requiring a completely complex light source system.
Solution Approach 2:
Different auxiliary light sources are assigned to different wavelength ranges based on the spectral characteristics required for specific measurement tasks. This allows the system to provide locally optimized wavelength correction for different regions of the spectrum rather than using a uniform approach across all wavelengths.
2Manufacturing precision
If the detection part is fixed in position, then the device structure is simple, but the resolution control flexibility is limited
Solution Approach 1:
The detection part is made movable and rotatable rather than fixed, allowing dynamic adjustment of the detection angle and position. This enables the system to control spectroscopic resolution by changing the detection geometry according to measurement requirements, transforming a static structure into an adaptable one.
Solution Approach 2:
The detection part can rotate around the optical axis and move along the optical path, adding angular and positional degrees of freedom. This multi-dimensional adjustment capability allows resolution control through geometric configuration changes rather than solely through optical element selection.
3Measurement precision
If wavelength-dependent resolution control is not implemented, then the device operation is simple, but the measurement accuracy across different wavelengths is compromised
Solution Approach 1:
The system changes operational parameters (detection angle, detection position) based on the wavelength being measured. By adjusting these parameters in response to wavelength requirements, the system achieves optimized measurement accuracy for each wavelength range while maintaining a relatively simple operational procedure through automated control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for accurate measurement and correction of wavelengths, improving the resolution and efficiency of semiconductor fabrication by reducing defects and production costs.
Implementation Method 1
a diffraction part including a diffraction grating configured to diffract a second light that is produced based on the first light being reflected from the target object the diffraction grating configured to produce a third light that is the diffracted second light
Data Source
AI summary
A spectroscopic device may include a light source part configured to emit a first light toward a target object, the light source part including a main light source and a plurality of auxiliary light sources, a diffraction part including a diffraction grating configured to diffract a second light that is produced based on the first light being reflected from the target object, the diffraction grating configured to produce a third light that is the diffracted second light, a detection part configured to detect the third light, and an analyzing part connected to the detection part. The detection part may include a plurality of pixels and an actuator. The plurality of auxiliary light sources may be configured to emit light rays of different wavelengths. The actuator may be configured to rotate and move the detection part.