Spherical Bearing Height Adjustment for Distortion-Free Inclination Control
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Solution Overview
Problem
Existing production apparatuses, such as semiconductor production apparatuses, face difficulties in adjusting the height and inclination of upper parts relative to lower parts without causing distortion, as described in Japanese Patent Laid-Open Publication No. JP 2008-141158.
Innovation Solution
A height adjustment device utilizing spherical plain bearings and lifters is installed between the lower and upper parts of the apparatus main body, allowing for precise adjustment of height and inclination without distortion by driving the lifters, which are controlled by a controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional height adjustment methods are used by adjusting the lower part, then the height of the upper part can be changed, but distortion occurs in the apparatus main body
Solution Approach 1:
The apparatus main body is divided into separate upper and lower parts that can be independently adjusted. The height adjustment device includes multiple adjustment mechanisms positioned at different locations, allowing each segment to be adjusted independently without causing distortion to the overall structure.
Solution Approach 2:
A height adjustment device is introduced as an intermediary mechanism between the upper and lower parts of the apparatus main body. This device includes spherical plain bearings and lifters that mediate the height adjustment process, enabling precise control while preventing direct stress transmission that would cause distortion.
2Manufacturing precision
If multiple adjustment points are used to adjust height, then height precision improves, but device complexity increases
Solution Approach 1:
The height adjustment device uses identical spherical plain bearing and lifter mechanisms at multiple adjustment points. Each adjustment mechanism performs the same function and has the same structure, allowing for standardized manufacturing and simplified maintenance while achieving precise height control through coordinated operation of multiple identical units.
3Stability of the object's composition
If spherical plain bearings are used for height adjustment, then distortion is prevented, but adjustment complexity increases
Solution Approach 1:
Spherical plain bearings are used instead of traditional linear guides or hinges. The spherical geometry allows for multi-directional movement and self-alignment, accommodating both height adjustment and inclination changes while maintaining structural stability. The spherical shape naturally distributes stresses and prevents distortion by allowing rotational freedom.
Solution Approach 2:
The adjustment mechanism transitions from static rigid connections to dynamic articulated connections using spherical plain bearings. This allows the structure to adapt to different positions and orientations while maintaining stability, converting a rigid system into a flexible one that can accommodate various configurations without distortion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise adjustment of the height and inclination of upper parts relative to lower parts, enhancing flexibility and reducing operator burden through automated control.
Implementation Method 1
a first spherical plain bearing, a second spherical plain bearing and a third spherical plain bearing that are interposed between the lower part and the upper part
Data Source
AI summary
A height adjustment device includes a lower part, an upper part, and a height adjustment unit including a first spherical plain bearing, a second spherical plain bearing, a third spherical plain bearing, a first lifter, a second lifter, and a third lifter. The height adjustment device is configured to adjust a height of the upper part with respect to the lower part by driving the first lifter, the second lifter, and the third lifter.