Spike Arrays for Sub-Micron Force Measurement

The patent replaces traditional mechanical load cell transducers with a nano-indentation-based measurement system. Instead of using mechanical transducers that require minimum travel, the invention uses an array of rigid spikes that imprint patterns on a softer film, converting force measurement into a static imprint pattern analysis that does not require displacement travel.

The patent introduces a softer film as an intermediary medium between the expanding actuator and the measurement system. The actuator expands and pushes against rigid spikes, which then imprint patterns on the softer film. This intermediary film allows the measurement of forces at sub-micron displacements by capturing the force distribution as static imprint patterns rather than requiring direct transducer contact and movement.

The patent divides the measurement system into a micro-scale configuration with an array of discrete spikes arranged in a grid pattern on a substrate. This segmented approach allows the measurement system to be scaled down to micro-component dimensions while maintaining measurement capability, as each spike independently records local force information in the imprint pattern.

The patent creates a copy of the force distribution pattern through the imprint process. The rigid spikes press into the softer film, creating a negative imprint pattern that replicates the force distribution applied by the expanding actuator. This copied pattern can be analyzed optically or microscopically to determine the original force magnitudes and distributions without requiring the actuator itself to be macroscopic.