Spin Chuck Cover Glass Refraction for Uniform Substrate Heating
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Solution Overview
Problem
Existing substrate treatment apparatuses face inefficiencies in uniformly transferring radiation heat from the heating part to the entire surface of a substrate due to interference with the back nozzle assembly and chuck base, leading to reduced heat transfer and non-uniform heating.
Innovation Solution
A substrate treatment apparatus with a slant refracting surface on the cover glass between the heating part and back nozzle assembly, allowing radiation heat to be refracted and uniformly transferred to the substrate surface without interference, using transparent or semi-transparent materials for the back nozzle assembly and slant heating portions to enhance central heating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If the heating part is spaced apart from the back nozzle assembly and chuck base to avoid heat interference, then heat transfer efficiency is improved, but the heating area is reduced leading to decreased total heat transfer
Solution Approach 1:
The patent introduces a slant refracting surface that redirects radiation heat at an angle, utilizing the angular dimension to guide heat around the back nozzle assembly and chuck base. This allows the heating part to maintain close proximity (preserving area) while the slanted surface directs heat pathways that avoid interfering components, effectively using spatial dimensionality to resolve the contradiction between heating area and heat transfer efficiency.
2Area of stationary object
If the heating part is located close to the substrate to maximize heating area, then total heat transfer increases, but interference with the back nozzle assembly and chuck base causes non-uniform heating
Solution Approach 1:
The slant refracting surface acts as an intermediary element between the heating part and the substrate. It receives radiation heat from the heating part and redirects it at specific angles to reach the substrate surface uniformly, mediating the heat transfer pathway to avoid direct interference with the back nozzle assembly and chuck base while maintaining close proximity for maximum heating area.
3Stability of the object's composition
If the cover glass thickness is increased to improve structural stability, then manufacturing precision is improved, but radiation heat transfer is blocked reducing heating efficiency
Solution Approach 1:
The patent changes the geometric parameters of the cover glass by introducing a slant refracting surface with specific angle and width. This modification allows the cover glass to maintain adequate thickness for structural stability while the slanted surface configuration optimizes radiation heat transmission by directing heat pathways through the thinnest portions of the glass, thereby resolving the contradiction between structural stability and heat transfer efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves uniform heating of the substrate surface by efficiently transferring radiation heat from the heating part, minimizing interference with the back nozzle assembly and ensuring consistent temperature distribution across the substrate.
Implementation Method 1
cover glass disposed between top of the spin chuck and the back nozzle assembly, when viewed in plan view, and having a through hole formed at the center thereof to pass the back nozzle assembly therethrough; and the heating part disposed inside the inner peripheral surface of the spin chuck in a space between the cover glass and the chuck support part, wherein when viewed in plan view, the cover glass has a slant refracting surface formed with a given width around the through hole
Implementation Method 2
a heating part with LEDs is located under the substrate to allow the substrate to be heated to a given temperature
Data Source
AI summary
The present disclosure relates to a substrate treatment apparatus having a heating part, including: a chuck base disposed rotatable around a rotational axis and having a ring-shaped spin chuck with chuck pins to support a substrate and a chuck support part located on lower portion of the inner peripheral surface of the spin chuck; a back nozzle assembly mounted at the center of the chuck base; cover glass disposed between top of the spin chuck and the back nozzle assembly; and a heating part disposed between the cover glass and the chuck support part, wherein slant refracting surface is formed on a central portion of the cover glass and slants upward in a radial direction with respect to the rotational axis.