Spin Chuck Pin Diagnosis for Reliable Substrate Support
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Solution Overview
Problem
The existing substrate processing methods face defects due to improper support by chuck pins during substrate processing, leading to issues such as substrate misalignment and potential damage, necessitating a method to diagnose the state of the chuck pins before processing.
Innovation Solution
A substrate processing apparatus equipped with a chuck diagnosis jig and pressure sensors to measure and analyze the pressure applied by chuck pins, allowing for real-time diagnosis and replacement or adjustment of faulty pins.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrate processing is performed without diagnosing chuck pin state, then processing speed is maintained, but substrate defects occur due to improper support
Solution Approach 1:
The patent implements a diagnosis jig that measures chuck pin states before substrate processing begins. Pressure sensors detect the position and condition of each chuck pin, and the system identifies abnormal pins through predetermined judgment criteria. This preliminary diagnosis ensures that only substrates processed with properly functioning chuck pins, preventing defects while maintaining processing efficiency.
2Reliability
If chuck pin state is diagnosed before processing, then substrate processing reliability is improved, but processing time increases
Solution Approach 1:
The diagnosis system measures pressure values from all chuck pins but applies selective judgment criteria to identify only abnormal pins. The system performs partial diagnosis by focusing on pins that deviate from predetermined ranges rather than requiring comprehensive analysis of all pins. This approach reduces diagnosis time while ensuring reliable identification of problematic chuck pins.
3Manufacturing precision
If abnormal chuck pins are identified and replaced, then substrate processing quality is improved, but device complexity increases
Solution Approach 1:
The diagnosis system is segmented into independent functional modules: pressure sensors for measurement, a judgment unit for analysis, and a display unit for output. Each module performs a specific function, allowing the system to diagnose chuck pin states without requiring complex integrated systems. This modular approach improves substrate processing quality while keeping the diagnosis system manageable and maintainable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures efficient and reliable substrate processing by identifying and correcting chuck pin issues, preventing defects and ensuring proper substrate support during processing.
Implementation Method 1
a pressure sensor for measuring a pressure value applied to the base part by the chuck pin when the plurality of chuck pins is driven from the standby position to the support position
Data Source
AI summary
Disclosed is an apparatus for processing a substrate, the apparatus including: a cup having a processing space with an open top; a spin chuck for supporting the substrate within the processing space; a liquid supply nozzle for supplying a processing liquid to the substrate supported on the spin chuck; and a chuck diagnosis jig for diagnosing a state of the spin chuck, in which the spin chuck includes: a body coupled to a rotary shaft; a plurality of chuck pins installed on the body and supporting a side of the substrate during a process; and a chuck pin driver for moving the plurality of chuck pins between a support position in which the plurality of chuck pins is in contact with an end of the substrate placed on the spin chuck and a standby position in which the plurality of chuck pins is spaced apart from the end of the substrate placed on the spin chuck.