Spin Chuck Speed Control for Resist Thickness Stability
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Solution Overview
Problem
The humidity level near a semiconductor substrate affects the fluidity of resist materials, causing fluctuations in the thickness of the resist layer formed during the manufacturing process, which can be mitigated by adjusting the rotation speed of the spin chuck based on humidity factors.
Innovation Solution
A system comprising a spin chuck, a dispensing unit, and humidity sensors that modify the rotation speed of the spin chuck according to humidity levels, using equations to determine the adjustment in speed based on current and prior humidity measurements, ensuring consistent resist layer thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the rotation speed of the spin chuck is kept constant, then the manufacturing process is simple and fast, but the resist layer thickness fluctuates due to humidity variations
Solution Approach 1:
The system uses humidity sensors to continuously monitor the humidity level near the semiconductor substrate and feeds this information back to a controller. The controller then adjusts the rotation speed of the spin chuck in real-time based on the detected humidity variations, creating a closed-loop feedback system that maintains consistent resist layer thickness despite environmental changes.
Solution Approach 2:
The invention dynamically changes the rotation speed parameter of the spin chuck based on detected humidity levels. By adjusting this key process parameter in response to environmental conditions, the system compensates for humidity-induced variations in resist material fluidity, thereby maintaining precise control over resist layer thickness.
2Manufacturing precision
If the rotation speed is adjusted based on humidity levels, then the resist layer thickness consistency is improved, but the process complexity and measurement requirements increase
Solution Approach 1:
The invention introduces humidity sensors as intermediary devices that detect the humidity level near the substrate and convert it into an electrical signal that the controller can process. This intermediary measurement system bridges the gap between environmental conditions and process control, enabling precise adjustment of rotation speed based on actual humidity levels without requiring complex direct measurement of resist layer properties.
3Adaptability or versatility
If a fixed rotation speed is used, then the equipment operation is simple, but the adaptability to humidity variations is poor
Solution Approach 1:
The invention transitions the spin chuck rotation speed from a static, fixed value to a dynamic parameter that automatically adjusts in response to changing humidity conditions. This dynamic control approach enables the system to adapt to environmental variations while maintaining ease of operation through automated control, eliminating the need for manual intervention or complex operational procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the thickness of the resist layer by adjusting the rotation speed in response to humidity variations, thereby improving the accuracy and consistency of the semiconductor manufacturing process.
Implementation Method 1
The spin chuck is rotated at a first speed. The first speed is determined based on a first humidity factor near the first semiconductor substrate.
Implementation Method 2
A first humidity factor near the first semiconductor substrate is obtained
Data Source
AI summary
A method for manufacturing a semiconductor structure is provided. The method includes the following operations. A first semiconductor substrate is provided on a spin chuck. A first humidity factor near the first semiconductor substrate is obtained. A resist material is dispensed on the first semiconductor substrate. The spin chuck is rotated at a first speed. The first speed is determined based on the first humidity factor.