Recirculation Spin Coater with Optical Controls

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Solution Overview

Problem

Existing spin coaters fail to effectively minimize coating material loss and adequately address work piece positioning and spin coater controls, particularly in a closed environment, which is crucial for manufacturing optical lenses.

Innovation Solution

A recirculation spin coater system with a substantially closed spin coating bowl, a recirculation drain for material recovery, and a vision system for optical controls, along with an annular array of light sources and a wetting fluid chamber to maintain a solvent-rich environment and prevent material loss, is developed. The system includes a coating nozzle with operable positions for dispensing and purging, and a rotating work piece holding chuck for precise alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of substance

If a closed spin coating bowl is used to maintain solvent-rich environment, then coating material loss is reduced, but illumination for optical controls becomes difficult

Engineering Contradiction:
Improvecoating material lossVSAvoidillumination for optical controls
Core Design Contradiction:
Loss of substanceVSIllumination intensity

Solution Approach 1:

A translucent barrier (such as a translucent cap or wall) is introduced as an intermediary between the closed bowl environment and the external light sources. This barrier allows light to pass through while maintaining the closed solvent-rich environment, enabling both material loss reduction and adequate illumination for optical controls

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of substance

If recirculation system is implemented to recover coating material, then material loss is minimized, but device complexity increases

Engineering Contradiction:
Improvecoating material lossVSAvoiddevice complexity
Core Design Contradiction:
Loss of substanceVSDevice complexity

Solution Approach 1:

The system implements a recirculation mechanism that captures coating material mist and solvent vapor, condenses it back to liquid form, and returns it to the coating material reservoir. This recovery process minimizes material loss while the integrated design keeps the added complexity manageable

Inventive Principle:
Principle #34Discarding and recovering

3Loss of substance

If substantially closed bowl structure is used to prevent material loss, then coating material loss is reduced, but work piece access and positioning becomes more difficult

Engineering Contradiction:
Improvecoating material lossVSAvoidwork piece access and positioning
Core Design Contradiction:
Loss of substanceVSEase of operation

Solution Approach 1:

The closed bowl structure is segmented with a removable or movable access port that allows work piece insertion and removal. The access port can be opened only when needed for loading/unloading, and remains closed during the coating process to maintain the solvent-rich environment and minimize material loss

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system significantly reduces coating material loss, ensures consistent coating application, and provides precise work piece alignment, enhancing the efficiency and cost-effectiveness of the spin coating process while maintaining a solvent-rich environment.

Implementation Method 1

an annular array of light sources surrounding sides of the spin coating bowl and configured to illuminate the interior of the spin coating bowl for optical controls

Methodology Applied
Scientific EffectIllumination: Light

Implementation Method 2

The spin coating bowl has a recirculation drain that is configured to allow coating material to be recovered from the spin coating bowl and return the recovered coating material to the source of coating material

Methodology Applied
Scientific EffectRecirculation: Convection

Implementation Method 3

a wetting fluid chamber associated with an upper end of the inner side walls and configured to dispense a side wall wetting fluid to the inner side walls of the spin coating bowl at least during operation of the nozzle

Methodology Applied
Scientific EffectWetting: Wetting

Implementation Method 4

Spin coating processes and associated spin coating machines are well known for efficiently providing a uniform coating to a substrate work piece

Methodology Applied
Scientific EffectSpin coating: Spin Coating

Data Source

PatentEP2057666B1Spin coater with optical controls
Publication Date: 2012.08.01 TRANSITIONS OPTICAL INC
  • EP2057666B1 patent drawingFigure 1
  • EP2057666B1 patent drawingFigure 2
  • EP2057666B1 patent drawingFigure 3

AI summary

A recirculation spin coater system includes a spin coating bowl with a having a recirculation drain and a wetting fluid chamber associated with the upper end of the inner side walls wherein the wetting fluid chamber is configured to dispense a side wall wetting fluid to inner side walls of the spin coating bowl. A vision system configured to capture images of the work piece within the spin coating bowl for quality control and work piece positioning. An annular array of light sources are surrounding sides of the spin coating bowl and are configured to illuminate the interior of the spin coating bowl for optical controls. The vision system may be utilized for both quality control and work piece positioning. The coating nozzle is configured to move between a first coating position vertically aligned with the work piece, and a second purge position vertically aligned with the recirculation drain.