Spin Coating Method for Flat Insulation Films on Fine Particle Substrates
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional spin coating methods, such as CVD, struggle to achieve film flatness on substrates with steps due to incomplete penetration of polymer solutions into fine particle films, especially when the films are thick, leading to uneven film deposition.
Innovation Solution
A spin coating method involving a two-stage rotational process where a polymer solution is initially spun onto a fine particle film at high speed, then slowed to allow penetration and evaporation, followed by a third stage of increased rotation to remove excess solution, ensuring thorough penetration and uniform film thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a polymer solution is applied onto a thick fine particle film and heat treatment is performed, then the fine particle film can be hardened, but the polymer solution cannot penetrate the fine particle film to the bottom or penetrates only locally
Solution Approach 1:
The patent applies dynamic control of substrate rotation speed during spin coating. The rotation speed is adjusted in multiple stages: initially at a first rotation speed to spread the polymer solution, then at a slower second rotation speed to allow penetration into the fine particle film, and finally at a third rotation speed to remove excess solution. This dynamic adjustment ensures complete penetration and uniform film formation without sacrificing flatness.
2Volume of moving object
If the fine particle film is formed to be thick to improve insulation performance, then the film thickness increases, but the polymer solution penetration becomes incomplete
Solution Approach 1:
The patent employs periodic action through multi-stage spin coating with different rotation speeds. The process cycles through spreading the polymer solution, allowing penetration at reduced speed, and removing excess material. This periodic variation in rotation speed enables complete penetration even through thick fine particle films, ensuring uniform film formation and consistent insulation performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method ensures complete penetration of the polymer solution into the fine particle film, resulting in a thick, flat, and high-quality insulation film, even in complex trench structures, while allowing for adjustable film thickness and improved surface flatness.
Implementation Method 1
When the fine particle film is formed to be thick, the polymer solution may be hardened, while the polymer solution has not penetrated the fine particle film to the bottom of the fine particle film
Implementation Method 2
applying a polymer solution onto the fine particle film, and hardening the fine particle film and the polymer solution by heat treatment
Implementation Method 3
Rotating of the underlying material is stopped or a rotational speed of the underlying material is reduced to 10 rpm or less. The underlying material is rotated after a first period elapses after the stopping of the rotating of the underlying material, or the rotational speed of the underlying material is increased after the first period elapses after the reducing of the rotational speed of the underlying material to spin off the solution from the upper surface of the first material film
Data Source
AI summary
A spin coating method according to an embodiment includes forming a first material film on an underlying material. The underlying material is rotated while a solution of a second material film is supplied onto an upper surface of the first material film to make the solution stay on the upper surface of the first material film. Rotating of the underlying material is stopped or a rotational speed of the underlying material is reduced to 10 rpm or less. The underlying material is rotated after a first period elapses after the stopping of the rotating of the underlying material, or the rotational speed of the underlying material is increased after the first period elapses after the reducing of the rotational speed of the underlying material to spin off the solution from the upper surface of the first material film.