Spin Coating Solution Mixing for Film Uniformity
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Solution Overview
Problem
Existing coating methods require a large volume of treatment solution, including resist solutions, to form a coating film, especially when dealing with solvents of high surface tension or low surface tension solvents that affect coatability.
Innovation Solution
A coating method that involves mixing a solvent with lower surface tension into the treatment solution during or after the start of its supply, allowing for efficient coating while reducing the overall volume of treatment solution required.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a large volume of treatment solution is supplied to the substrate, then the coating film can be formed with sufficient thickness and uniformity, but the consumption of treatment solution increases
Solution Approach 1:
The patent applies preliminary action by performing a pre-wet treatment with a solvent before supplying the treatment solution. The solvent is supplied onto the substrate and allowed to penetrate and spread, creating a prepared surface that improves subsequent treatment solution distribution. This preliminary step ensures that when the treatment solution is supplied, it spreads more uniformly across the substrate surface, achieving better coating film uniformity without requiring excessive amounts of the treatment solution.
2Ease of operation
If a solvent with low surface tension is mixed into the treatment solution, then the coatability and spreadability improve, but the treatment solution composition becomes more complex
Solution Approach 1:
The patent applies parameter changes by modifying the surface tension parameter of the treatment solution through the addition of a solvent with low surface tension. The solvent component (5-50 mass%) lowers the overall surface tension of the treatment solution, enabling it to spread more easily and uniformly across the substrate surface. This parameter modification improves coatability and reduces the volume of treatment solution needed, while the complexity increase is managed through controlled formulation within a specific concentration range.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively reduces the required volume of treatment solution by up to 50% compared to conventional methods, while maintaining satisfactory coating performance and film thickness uniformity.
Implementation Method 1
mixing a solvent for the treatment solution lower in surface tension than the treatment solution into the treatment solution
Data Source
AI summary
A coating method of supplying a treatment solution to a substrate and coating the substrate with the treatment solution by a spin coating method. The method includes mixing a solvent for the treatment solution lower in surface tension than the treatment solution into the treatment solution concurrently with a start of supply of the treatment solution or later than the start of the supply of the treatment solution, and then supplying the treatment solution to the substrate.