Spin Head Chuck Pin Dynamics for Stable Substrate Support
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Solution Overview
Problem
Existing substrate processing technologies face challenges in stabilizing substrate support during high-speed rotation, particularly in ensuring consistent contact of chuck pins with the substrate's lateral surface, which can lead to unstable processing outcomes.
Innovation Solution
A spin head design featuring a support plate with chuck pins that move between supporting and waiting positions via a chuck pin moving unit, utilizing a driving member with guides, a rotation plate, and elastic members to maintain contact and adjust positions, ensuring all chuck pins are in contact with the substrate's lateral surface, even at high speeds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chuck pins are fixed in position on the support plate, then the structure is simple, but the substrate support becomes unstable during high-speed rotation
Solution Approach 1:
The chuck pin structure transitions from a fixed static configuration to a dynamic adjustable one. The movable chuck pins can change their radial position from a retracted state to an extended state, allowing the system to adapt to different operational requirements and maintain stability during high-speed rotation while preserving structural simplicity when not in use.
Solution Approach 2:
The chuck pins are pre-positioned in a retracted state during substrate loading, allowing easy substrate placement. Before rotation begins, the chuck pins are extended to the operational position to ensure stable support during high-speed rotation, preparing the system in advance for the upcoming operational demands.
2Reliability
If chuck pins are positioned to contact substrate lateral surface, then substrate support is stable, but not all pins may contact simultaneously leading to concentrated force
Solution Approach 1:
The movable chuck pin structure enables dynamic adjustment of pin positions, allowing all pins to be extended to the same radial distance from the center. This ensures simultaneous contact with the substrate lateral surface, distributing the supporting force evenly across all pins and preventing concentrated loads on individual pins during high-speed rotation.
3Productivity
If spin head rotates at high speed, then processing efficiency increases, but substrate support stability decreases
Solution Approach 1:
The system employs movable chuck pins that can be extended to a predetermined radial position before high-speed rotation begins. This dynamic positioning ensures optimal contact with the substrate lateral surface, maintaining stable support even during high-speed rotation and enabling increased processing efficiency without sacrificing reliability.
Solution Approach 2:
Before the spin head enters high-speed rotation, the chuck pins are extended to the operational position to ensure proper substrate clamping. This preliminary action prepares the support system in advance, ensuring stability is established before the centrifugal forces of high-speed rotation begin to act on the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design stabilizes substrate support, prevents concentrated force on individual chuck pins, and maintains contact with the substrate during high-speed rotation, enhancing processing stability and efficiency.
Implementation Method 1
the restorer includes an elastic member that has a first end coupled to the rotation plate and a second end coupled to the support plate to generate restoring force through elasticity
Data Source
AI summary
Provided is a spin head. Chuck pins, installed at a support plate to support the lateral surface of a substrate, are moved along the perpendicular direction to the radial direction of the support plate. The effect of centrifugal force applied to the chuck pins during the rotation of the support plate is minimized to support a substrate stably.