Spin Qubit Coupling via Self-Aligned Back Gate

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Solution Overview

Problem

Existing quantum devices with spin qubits lack modulable quantum coupling, preventing effective communication and operation as multiple qubits, due to fixed quantum coupling and potential misalignment issues leading to parasitic capacitances and asymmetry.

Innovation Solution

A quantum device with adjustable tunnel barriers between qubit confinement regions, controlled by a doped region in the support layer, allowing for modulated coupling without superimposed gates, thus minimizing capacitive coupling and ensuring self-alignment of rear control gates with front gates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If superimposed gates are used to control coupling between qubits, then coupling control is achieved, but strong capacitive coupling is generated between the gates

Engineering Contradiction:
Improvecoupling controlVSAvoidcapacitive coupling
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The invention transitions from a planar gate configuration to a three-dimensional structure by placing the rear control gate in the support layer beneath the buried dielectric layer, while front gates remain in the semiconductor layer. This vertical separation in different layers eliminates strong capacitive coupling while maintaining coupling control capability through the tunnel barrier modulation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The buried dielectric layer acts as an intermediary between the rear control gate in the support layer and the front gates in the semiconductor layer. This dielectric medium provides electrical insulation that prevents direct capacitive coupling between the gates, while still allowing the rear gate to modulate the tunnel barrier height through field effect.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If conventional gate structures are used, then qubit control is possible, but misalignment and parasitic capacitances occur

Engineering Contradiction:
Improvequbit controlVSAvoidalignment precision
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The rear control gate structure is designed to be self-aligned with the front gates through the semiconductor portion geometry. The doped region in the support layer is positioned to align automatically with the tunnel barrier region during fabrication, eliminating the need for complex alignment procedures and reducing parasitic capacitances from misalignment.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The support layer and buried dielectric layer are prepared in advance before introducing the front gates and tunnel barrier. This preliminary structuring establishes the rear control gate position and geometry beforehand, ensuring proper alignment when the tunnel barrier is formed, and preventing misalignment issues during subsequent fabrication steps.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible and efficient communication between qubits by adjusting the tunnel barrier, reducing parasitic capacitances and asymmetry, allowing for reliable operation as multiple qubits with improved performance.

Implementation Method 1

The coupling between the qubit confinement regions is adjustable thanks to a tunnel barrier formed by the coupling region, the level of this tunnel barrier being adjustable as a function of the electric potential applied to the doped region of the support layer which acts by field effect on the level of this tunnel barrier

Methodology Applied
Scientific EffectField effect: Electric Field

Data Source

PatentEP3473592B1Quantum device with spin qubits coupled in a scalable manner
Publication Date: 2023.04.19 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP3473592B1 patent drawingFigure 1A~1B
  • EP3473592B1 patent drawingFigure 2A~3B
  • EP3473592B1 patent drawingFigure 4A~5A

AI summary

Spin qubit quantum device (100), comprising: - a portion of semiconductor (104) disposed on a buried dielectric layer (106) of a semiconductor-on-insulator substrate also comprising a support layer (102) of semiconductor, in which distinct first parts (108a, 108b) each form a confinement region of one of the qubits and are separated from each other by a second part (116) forming a coupling region between the confinement regions of the qubits; - front gates (110) each at least partially covering one of the first parts of the portion of semiconductor; and in which the support layer includes a doped region (118) a portion of which is disposed vertically above the second part of the portion of semiconductor and is self-aligned with respect to the front gates, and forms a back gate for controlling the coupling between the confinement regions of the qubits.