Spin Treatment Apparatus Airflow Liquid Management
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Solution Overview
Problem
Conventional spin treatment apparatuses are large and heavy due to the need for a larger liquid receiver to prevent liquid splash-back, which increases the size and weight while compromising efficiency in semiconductor and liquid crystal display manufacturing processes.
Innovation Solution
The apparatus incorporates an annular liquid receiver with slanted plate members and airflow channels to effectively collect and redirect liquid droplets, reducing splash-back and allowing for a more compact design by minimizing the distance between the substrate and the liquid receiver.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the wall surface of the liquid receiver is placed away from the end of the substrate to prevent liquid splash-back, then liquid splash-back is prevented, but the size and weight of the spin treatment apparatus increase
Solution Approach 1:
An airflow generator is introduced as an intermediary element between the substrate and the liquid receiver. This airflow acts as a mediator that prevents liquid splash-back by creating a protective air barrier, allowing the liquid receiver to be positioned closer to the substrate without direct liquid contact, thus reducing apparatus size and weight while still preventing harmful liquid rebound
Solution Approach 2:
The invention utilizes pneumatic principles by generating airflow to control liquid behavior. The airflow generator creates a gas flow that interacts with the liquid trajectory, using pneumatic pressure and flow dynamics to prevent liquid splash-back without requiring increased physical distance, thereby maintaining compact apparatus dimensions
2Object-affected harmful factors
If the wall surface of the liquid receiver is placed away from the end of the substrate to prevent liquid splash-back, then liquid splash-back is prevented, but the size of the spin treatment apparatus increases
Solution Approach 1:
An airflow generator is introduced as an intermediary element between the substrate and the liquid receiver. This airflow acts as a mediator that prevents liquid splash-back by creating a protective air barrier, allowing the liquid receiver to be positioned closer to the substrate without direct liquid contact, thus reducing apparatus size and weight while still preventing harmful liquid rebound
Solution Approach 2:
The invention utilizes pneumatic principles by generating airflow to control liquid behavior. The airflow generator creates a gas flow that interacts with the liquid trajectory, using pneumatic pressure and flow dynamics to prevent liquid splash-back without requiring increased physical distance, thereby maintaining compact apparatus dimensions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces liquid splash-back, enabling a smaller and lighter spin treatment apparatus that maintains effective liquid management and treatment efficiency.
Implementation Method 1
an annular cup body surrounding the liquid receiver at a distance from an outer periphery of the liquid receiver and forming an annular outer exhaust flow channel for generating an airflow along an upper surface to an outer peripheral surface of the liquid receiver; and an annular partitioning member provided inside the annular liquid receiver and forming an annular inner exhaust flow channel for generating an airflow along an inner peripheral surface of the liquid receiver
Data Source
AI summary
A spin treatment apparatus includes an annular liquid receiver, an annular cup body and an annular partitioning member. The annular liquid receiver surrounds a rotating substrate at a distance from an outer periphery of the substrate and is configured to receive liquid flying from the rotating substrate and accommodate the liquid. The annular cup body surrounds the liquid receiver at a distance from an outer periphery of the liquid receiver and forms an annular outer exhaust flow channel for generating an airflow along an upper surface to an outer peripheral surface of the liquid receiver. The annular partitioning member is provided inside the annular liquid receiver and forms an annular inner exhaust flow channel for generating an airflow along an inner peripheral surface to a lower surface of the liquid receiver.