Spindle Slurry Pipe Cleaning Water Ejection
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Solution Overview
Problem
During the polishing process, abraded debris from the slurry is scattered onto the inner wall of the spindle, contaminating it and eventually falling onto the workpiece, which interferes with the polishing process and can smear the polished surface.
Innovation Solution
A slurry supply pipe with an ejection port above the supply port is used to introduce cleaning water at a higher flow rate than slurry, which is directed towards the inner wall of the spindle to remove deposited debris, preventing it from falling onto the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the slurry supply pipe extends closely to the polishing pad opening to prevent contamination, then the risk of slurry contamination inside the spindle is reduced, but abraded debris accumulates on the inner wall surface and eventually falls onto the workpiece
Solution Approach 1:
The invention extracts the harmful abraded debris from the spindle interior by introducing cleaning water that flows through the axial bore and ejects debris through the ejection port, separating the debris removal function from the slurry supply function
Solution Approach 2:
Cleaning water acts as an intermediary substance that enters the axial bore, contacts the deposited slurry and abraded debris on the inner wall, and transports it out through the ejection port, preventing contamination of the workpiece
2Productivity
If high-speed rotation of chuck table and spindle is used for efficient polishing, then polishing productivity is improved, but centrifugal force scatters slurry onto the inner wall surface causing deposition
Solution Approach 1:
The invention maintains continuous polishing operation at high speed while simultaneously introducing cleaning water to continuously remove deposited slurry, ensuring both polishing productivity and prevention of harmful accumulation
Solution Approach 2:
The cleaning water is introduced periodically or continuously during polishing to flush away abraded debris that accumulates on the inner wall, preventing it from falling onto the workpiece
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cleaning water effectively removes abraded debris from the spindle's inner wall, preventing it from interfering with the polishing process and maintaining a clean surface on the workpiece.
Implementation Method 1
introducing the cleaning water into the slurry supply pipe at a flow rate set to such a value, which is larger than the flow rate of the slurry, that the cleaning water introduced into the slurry supply pipe is ejected from the ejection port toward the inner wall surface of the spindle
Implementation Method 2
the cleaning water introduced into the slurry supply pipe is ejected from the ejection port toward the inner wall surface of the spindle and cleans the inner wall surface of the spindle
Data Source
AI summary
A polishing apparatus includes a polishing unit having a spindle having an axial bore defined therein, a housing by which the spindle is rotatably supported, a polishing pad mounted on an end of the spindle and having an opening defined therein that is held in fluid communication with the axial bore, a slurry supply pipe inserted in the axial bore in the spindle and having a supply port supplying a slurry to the workpiece held on the chuck table and an inlet port remote from the supply port, introducing the slurry into the slurry supply pipe, a slurry introducing unit connected to the inlet port of the slurry supply pipe, introducing the slurry into the inlet port, and a cleaning water introducing unit connected to the inlet port of the slurry supply pipe, introducing cleaning water into the inlet port.