Spinless Coater Nozzle and Stage Cleaning Apparatus
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Solution Overview
Problem
Existing coating apparatuses face damage to nozzles due to impurities on substrates and impurities remaining on stages during resin coating processes, leading to defects in the coating process.
Innovation Solution
A coating apparatus and method that incorporates a nozzle cleaner and a stage cleaner to detect and remove impurities, preventing nozzle damage by ensuring a clean substrate and stage surface before resin discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If resin coating is performed using a nozzle, then coating precision is improved, but nozzle damage occurs due to impurities on substrate and stage
Solution Approach 1:
The patent applies preliminary action by cleaning the substrate and stage surfaces before resin coating to remove impurities that could damage the nozzle. The cleaning unit performs surface cleaning operations prior to the coating process, ensuring that no particles or contaminants remain that could cause nozzle damage during resin discharge.
Solution Approach 2:
The patent introduces a cleaning unit as an intermediary between the substrate/stage and the nozzle. This cleaning unit acts as a mediator that removes harmful impurities from the substrate and stage surfaces, protecting the nozzle from direct contact with contaminants while maintaining the precision coating function.
2Reliability
If cleaning units are added to remove impurities, then nozzle protection is improved, but device complexity increases
Solution Approach 1:
The patent merges the cleaning function with the existing coating apparatus structure. The cleaning unit is integrated into the apparatus, sharing common components such as the controller and structural framework with the coating unit, thereby reducing overall system complexity while providing comprehensive nozzle protection.
Solution Approach 2:
The cleaning unit is designed with multi-functionality, capable of cleaning both the substrate surface and the stage surface using unified cleaning mechanisms. This universal design reduces the need for separate cleaning systems for different components, thereby minimizing device complexity while ensuring thorough impurity removal for nozzle protection.
Data Source
AI summary
A coating apparatus and an operating method thereof that prevent damage to the nozzle of a spinless coater from impurities on a substrate during resin coating of the substrate, and impurities remaining on a stage at the bottom of the substrate. The coating apparatus comprises a stage, a nozzle, a nozzle cleaner, and a stage cleaner. A substrate is placed upon the stage. The nozzle discharges resin on the substrate to perform coating. The nozzle cleaner cleans the nozzle. The stage cleaner cleans the stage. The operating method includes removing a coated first substrate from atop a stage, cleaning the stage using a stage cleaner, introducing a second substrate to be coated onto the cleaned stage, and discharging resin through a nozzle onto the second substrate and coating the second substrate.