Spiral Heater Assembly for Uniform Temperature Control
Solution Overview
Problem
Existing high-temperature heating systems for batch processing chambers in semiconductor manufacturing face challenges in achieving uniform temperature distribution, which is crucial for processes like ALD and CVD, due to the complexity and size of batch processing chambers.
Innovation Solution
The implementation of a heater assembly with a cylindrical body featuring axially spaced, spiral-shaped heating elements that are spaced sufficiently to prevent arcing between adjacent coils, ensuring uniform heating and maintaining temperature control across large substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If resistive heaters are used in batch processing chambers, then heating function is provided, but temperature uniformity across the substrate surface deteriorates
Solution Approach 1:
The heating system is divided into multiple independent heating zones along the axial direction, with each heating element responsible for a specific zone. This segmentation allows independent control and optimization of temperature in different regions, thereby improving overall temperature uniformity across the substrate surface.
Solution Approach 2:
Different heating elements are positioned at different axial locations to provide localized heating where needed. The spiral configuration of heating elements ensures that heat is distributed evenly within each local zone, addressing the temperature uniformity issue in specific regions rather than applying a uniform heating approach throughout.
2Power
If heating elements are placed close together to increase heating efficiency, then heating power is improved, but electrical arcing between adjacent coils occurs
Solution Approach 1:
The heating elements are configured in a spiral shape rather than straight lines, which naturally increases the distance between adjacent coils while maintaining a compact axial footprint. This curved configuration prevents electrical arcing by ensuring adequate spacing between coils, even when heating elements are densely packed along the axial direction to maximize heating power.
3Productivity
If high temperature processing is implemented, then processing efficiency is improved, but temperature control precision deteriorates
Solution Approach 1:
The division into multiple axially spaced heating zones enables independent control of each zone, allowing for precise temperature management even at high temperatures. Each heating element can be controlled separately to maintain the desired temperature profile, preventing overheating in specific regions and improving overall temperature control precision during high-temperature processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides predictable and reduced delta potential between heating zones, preventing electrical arcing and ensuring consistent temperature uniformity, thereby enhancing the efficiency and accuracy of batch processing in semiconductor manufacturing.
Implementation Method 1
Resistive heaters are widely employed in the heating systems of CVD and ALD systems
Implementation Method 2
Each coil of the spiral shape is spaced from an adjacent coil by a distance sufficient to prevent arcing between adjacent coils
Data Source
AI summary
Heater assemblies comprising a cylindrical body with a surface and a central axis including a plurality of heating elements are described. The plurality of heating elements is axially spaced on the surface of the cylindrical body. Each of the heating elements forms an axially spaced heating zone. Each heating element has a spiral shape with an inner end and an outer end defining a length of the heating element. Each coil of the spiral shape is spaced from an adjacent coil by a distance sufficient to prevent arcing between adjacent coils.