Spiral Compact Light Source for EUV Metrology
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Solution Overview
Problem
Compact light sources with small footprints face limitations in integrating undulators and wigglers due to limited space, restricting their ability to host multiple insertion devices, which is a challenge for applications requiring a wide wavelength range like actinic mask inspection.
Innovation Solution
A spiral compact light source is developed, where multiple storage rings are connected in a spiral configuration, providing multiple straight sections for insertion devices, reducing the required floor space and enhancing beam intensity and radiation power by tripling the central cone radiation power and increasing the coherent content of the light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a compact light source with small footprint is used, then the floor space requirement is reduced, but the ability to integrate multiple undulators or wigglers is limited
Solution Approach 1:
The patent transitions from a planar arrangement of storage rings to a vertical spiral configuration. Multiple storage rings are stacked vertically and connected through spiral transfer lines, allowing the system to utilize the third dimension (vertical space) rather than expanding horizontally. This enables multiple insertion devices to be integrated across different vertical levels while maintaining a compact horizontal footprint.
Solution Approach 2:
The spiral compact light source nests multiple storage rings within a compact vertical structure. Each storage ring is positioned at a different vertical level, and they are interconnected through spiral transfer lines that efficiently utilize the vertical space. This nested arrangement allows multiple undulators to be integrated in a space-efficient manner.
2Adaptability or versatility
If multiple storage rings are arranged in a planar configuration, then multiple straight sections for insertion devices are available, but the required floor space increases significantly
Solution Approach 1:
The patent resolves this contradiction by stacking multiple storage rings vertically and connecting them through spiral transfer lines. This three-dimensional arrangement provides multiple straight sections for insertion devices at different vertical levels while confining the horizontal footprint to a compact area, effectively trading horizontal expansion for vertical utilization.
Solution Approach 2:
The light source is segmented into multiple independent storage rings, each capable of hosting insertion devices. These segmented rings are arranged vertically and connected through spiral transfer lines, allowing each segment to function independently while contributing to the overall versatility of the system.
3Adaptability or versatility
If the storage ring circumference is increased to accommodate more undulators, then the number of insertion devices increases, but the ion trapping effects and emittance increase
Solution Approach 1:
Instead of using one large storage ring that would suffer from ion trapping and emittance issues, the system is divided into multiple smaller storage rings. Each ring has a manageable circumference that avoids strong ion trapping effects while still providing straight sections for undulators. The spiral connection allows these smaller rings to function together as a versatile multi-undulator system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The spiral configuration allows for a compact, cost-effective light source that fits within conventional laboratories, achieving a five-fold increase in overall light beam power and maintaining electron beam intensity stability, while reducing ion trapping effects and system redundancy.
Implementation Method 1
The present invention relates to a compact light source based on accelerator technology with straight sections for the implementation of insertion devices
Implementation Method 2
providing exemplarily (but not limited to) light having the characteristics for actinic mask inspection, such as at 13.5 nm
Data Source
AI summary
A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.