Spiral Gas Flow Plug Structure for Higher-Yield Ceramic Molding
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Solution Overview
Problem
The existing method for manufacturing plugs for semiconductor manufacturing apparatuses faces challenges in yield due to the damage of cores formed in a one-piece mold, which complicates the production process.
Innovation Solution
The introduction of a plug design with a spiral gas flow path and branch paths that allow for the use of multiple cores in the mold, preventing core damage and enabling efficient manufacturing through a method involving ceramic slurry injection and firing, with optional 3D printing for mold creation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a one-piece mold with a spiral core is used to manufacture the plug, then the plug structure can be formed in one step, but the spiral core is likely to be damaged and manufacturing yield decreases
Solution Approach 1:
The invention divides the single spiral core into multiple segmented cores (first spiral core and second spiral core). Each core is independently supported by the mold structure, preventing the damage that occurs when a single long spiral core is held only at its base. This segmentation allows each core to be shorter and more stable, thereby improving manufacturing yield while maintaining the one-step molding process.
2Adaptability or versatility
If the spiral core is made elongated to form the complete gas flow path, then the plug functionality is achieved, but the core becomes more susceptible to damage
Solution Approach 1:
The elongated spiral core is divided into multiple shorter spiral cores connected by communication holes. This segmentation maintains the complete gas flow path functionality while reducing the length of each individual core, thereby improving its structural integrity and resistance to damage during the molding process.
Solution Approach 2:
Multiple spiral cores are nested within the mold structure, with each core positioned and supported by the mold walls. The cores are arranged such that they interconnect through communication holes in the plug body, creating the complete gas flow path while each core benefits from individual support, preventing damage.
3Reliability
If multiple spiral cores are used in the mold, then core damage is prevented, but the mold structure becomes more complex
Solution Approach 1:
The mold structure is segmented to include multiple independent core support regions. Each spiral core is held by the mold at multiple points along its length, creating a modular structure that, while more complex than a single core, provides superior reliability and manufacturing yield through the prevention of core damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the stable and efficient production of plugs with improved yield, preventing core damage and enhancing the manufacturing process by using branch paths that communicate or open on the outer surface, effectively utilizing the mold structure.
Implementation Method 1
a method of manufacturing a plug includes a process of manufacturing a molded body by injecting and solidifying a ceramic slurry in a resin mold
Implementation Method 2
helium that is a heat conduction gas is supplied to a back surface of the wafer via the spiral gas flow path of the plug in order to improve heat conduction between the wafer and the ceramic plate
Implementation Method 3
high-frequency power is applied between the cooling plate and a flat plate electrode that is disposed at an upper portion of the wafer, and the plasma is generated at the upper portion of the wafer
Data Source
AI summary
A plug includes a plug body, a spiral gas flow path that is provided in the plug body and that extends from a lower surface of the plug body to an upper surface, and at least one branch path that branches from a position on the spiral gas flow path and that opens on an outer circumferential surface of the plug body or that is in communication with another spiral gas flow path that differs from the spiral gas flow path and that extends from a lower surface of the plug body to an upper surface.