Splash Prevention Member Cleaning for Metal Contamination Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Metallic components from metal-containing coating films can contaminate substrates and processing equipment during lithography processes, as they are not effectively removed from splash prevention members, leading to equipment contamination and pattern defects.
Innovation Solution
A film processing unit is designed with a splash prevention member that receives processing liquids and includes a removal liquid supplier to dissolve and remove metallic components, using a first removal liquid for metal-containing coating films and a second removal liquid for coating liquids, guided by a guide member to efficiently clean the splash prevention member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a splash prevention member is cleaned with use of a solvent, then the processing liquid and solidified matter are removed, but metallic components are not removed and remain on the splash prevention member
Solution Approach 1:
The invention changes the chemical parameter of the cleaning agent from ordinary solvent to acid-based removal liquid, which fundamentally alters the cleaning mechanism to enable metal dissolution while maintaining ease of operation
Solution Approach 2:
The acid-based removal liquid acts as an intermediary substance that mediates between the splash prevention member and metallic components, enabling selective removal of metals while leaving the substrate and other components unaffected
2Reliability
If the splash prevention member is surrounded to receive splashed processing liquid, then liquid reception is improved, but metal components adhere to the splash prevention member and cause contamination
Solution Approach 1:
The invention converts the harmful effect of metal adhesion into a beneficial cleaning target by using acid-based removal liquid that specifically dissolves metallic components, transforming the contamination problem into a controlled removal process
Solution Approach 2:
The acid-based removal liquid is supplied in advance to the splash prevention member before metal contamination can spread to substrates or equipment, preventing harmful effects before they occur
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents metal contamination of substrates and equipment by effectively dissolving and removing metallic components from the splash prevention member, ensuring clean processing environments and maintaining equipment integrity.
Implementation Method 1
a removal liquid supplier that is configured to supply a first removal liquid for dissolving metal to the splash prevention member
Data Source
AI summary
A substrate is held and rotated by a spin chuck, and a coating liquid is discharged to the substrate. The coating liquid that is splashed outwardly from the substrate is received by an outer cup. A cleaning liquid that has been discharged from a cup cleaning nozzle is discharged to an inner peripheral surface of the outer cup through a first guide to clean the outer cup. Thus, the coating liquid, its solidified matter and the like adhering to the outer cup are dissolved and removed from the outer cup. Subsequently, a metal removal liquid that has been discharged from the cup cleaning nozzle is discharged to an inner peripheral surface of the outer cup through a second guide. Thus, a metallic component remaining on the outer cup is dissolved and removed from the outer cup.