Splashguard Baffle Disc and Deflector Ledge for High Flow Vacuum
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Solution Overview
Problem
Existing chemical precursor containers for CVD processes face issues with liquid droplets and aerosol formation during vapor delivery, leading to corrosion, uneven flow, and particulate generation, which are not effectively addressed by existing splashguard designs, especially under high vacuum or high pressure conditions.
Innovation Solution
A container design featuring a diptube inlet, baffle discs, and an annular radially inward projecting deflector ledge that creates a tortuous flow path to minimize liquid droplet entry into the outlet, allowing high flow rates and vacuum conditions while maintaining vapor delivery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing splashguard designs are used, then liquid droplet prevention is partially achieved, but high flow rates and vacuum conditions cannot be maintained
Solution Approach 1:
The splashguard is divided into multiple functional components: a baffle disc with peripheral openings and a deflector ledge with radially inwardly extending portions. This segmentation allows each component to address specific aspects of droplet prevention while maintaining overall vapor flow, resolving the contradiction between droplet prevention and high flow rate capability
Solution Approach 2:
The deflector ledge features radially inwardly extending portions that create asymmetric flow paths. These asymmetric structures effectively intercept liquid droplets moving outward while allowing vapor to pass through the peripheral openings, enabling droplet prevention without restricting high flow rates
2Object-affected harmful factors
If existing splashguard designs are used, then some droplet prevention is achieved, but aerosol formation and particulate generation persist
Solution Approach 1:
The baffle disc acts as an intermediary element between the liquid chemical and the outlet. Its peripheral openings allow vapor to pass while the deflector ledge intercepts liquid droplets before they can form aerosols or particulates, effectively eliminating both droplet and aerosol formation simultaneously
3Reliability
If existing splashguard designs are used, then partial protection is provided, but corrosion and cleanup issues remain
Solution Approach 1:
The splashguard components (baffle disc and deflector ledge) are positioned to intercept and redirect liquid droplets before they can reach the outlet and cause corrosion or require cleanup. This preliminary action prevents harmful effects before they occur, maintaining system reliability without additional maintenance requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures consistent vapor delivery, reduces semiconductor tool downtime, and minimizes particulate generation by preventing aerosol droplet formation and allowing full container usage, even at low chemical levels, thereby reducing costs and maintenance.
Implementation Method 1
A container design featuring a diptube inlet, baffle discs, and an annular radially inward projecting deflector ledge that creates a tortuous flow path to minimize liquid droplet entry into the outlet
Implementation Method 2
passing a carrier gas through a diptube of the container; entraining liquid chemical precursor from the container into the carrier gas
Data Source
AI summary
The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.