Split-Beam Optical Processing for Precise Multi-Point Condensing

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Solution Overview

Problem

Existing optical processing apparatuses face challenges in efficiently forming structures on objects using laser beams, as they struggle to achieve precise control over the formation of multiple condensing points on a surface, limiting processing capacity and flexibility in structure design.

Innovation Solution

The optical processing apparatus employs a split optical system to divide a first light beam into multiple beams, which are then processed by a magnification varying optical system and condensed by a condensing optical system, allowing for adjustable beam angles and diameters, and includes a swingable reflective surface to enhance processing capacity and flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single light beam is used for processing, then the optical system is simple, but the processing capacity and speed are limited

Engineering Contradiction:
Improveprocessing capacityVSAvoidoptical system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing a single first light beam into multiple second light beams using a split optical system. This allows multiple condensing points to be formed simultaneously on the object surface, thereby increasing processing capacity without requiring multiple independent light sources. The single beam is segmented into parallel beams that can be independently controlled and focused.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent merges multiple optical functions into a unified system. The magnification varying optical system and condensing optical system work together to process multiple light beams simultaneously, combining beam splitting, magnification adjustment, and focusing functions into an integrated optical pathway that increases productivity while managing system complexity.

Inventive Principle:
Principle #5Merging (Combining)

2Productivity

If multiple light beams are used to increase processing capacity, then the processing speed improves, but the control precision over condensing points becomes difficult

Engineering Contradiction:
Improveprocessing speedVSAvoidcondensing point control precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The magnification varying optical system serves multiple functions simultaneously: it adjusts the magnification for each second light beam individually, controls the condensing point positions, and maintains beam parallelism. This multi-functional component enables precise control of multiple condensing points while processing at high speed, resolving the contradiction between productivity and precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If the structure size and design are fixed, then the optical system is simple, but the adaptability to different processing requirements is limited

Engineering Contradiction:
Improvestructure design flexibilityVSAvoidoptical system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements dynamics through the magnification varying optical system, which can dynamically adjust the magnification of each light beam independently. This allows the condensing point sizes and positions to be changed in real-time according to different processing requirements, providing high adaptability for various structure designs without requiring complex reconfiguration of the entire optical system.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the formation of multiple condensing points on a surface, improving processing capacity and allowing for adjustable structure sizes and designs, thereby enhancing the optical processing apparatus's ability to form complex patterns and increase processing speed.

Implementation Method 1

a split optical system configured to split a first light beam, which enters thereto, into a second light beam including a plurality of light beams

Methodology Applied
Scientific EffectOptical splitting:

Implementation Method 2

a magnification varying optical system in which a magnification is changed by a movement of an optical member

Methodology Applied
Scientific EffectMagnification variation:

Implementation Method 3

a condensing optical system configured to condenses the second light beam

Methodology Applied
Scientific EffectOptical condensation: Focusing

Implementation Method 4

the reflective surface reflects the plurality of light beams included in the second light beam

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS20230390864A1Optical processing apparatus
Publication Date: 2023.12.07 NIKON CORP
  • US20230390864A1 patent drawing
  • US20230390864A1 patent drawing
  • US20230390864A1 patent drawing

AI summary

An optical processing apparatus includes: a split optical system configured to split a first light beam, which enters thereto, into a second light beam including a plurality of light beams; a magnification varying optical system that is disposed on at least one of an optical path of the first light beam entering the split optical system and an optical path of the plurality of light beams included in the second light beam emitted from the split optical system; and a condensing optical system configured to condenses the second light beam, wherein an object is processed by the second light beam from the condensing optical system.