Split Chamber Assembly With Diagonal Interface
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Solution Overview
Problem
In semiconductor fabrication facilities, the clustering of process modules for efficient space utilization reduces access for maintenance and servicing, requiring technicians to navigate tight spaces or disassemble tools, which is time-consuming and can lead to downtime.
Innovation Solution
A split chamber assembly with a diagonal interface between the upper and lower chambers, allowing the upper chamber to pivot or rotate away for easy access, maintaining alignment of electrodes and enabling servicing without disassembly, using hinge connects and kinematic pins for precise alignment and easy reattachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If process modules are clustered in closer orientations for efficient space utilization, then space utilization and throughput are improved, but access for maintenance and servicing is reduced
Solution Approach 1:
The chamber body is segmented into an upper chamber and a lower chamber that can be separated from each other. The upper chamber is made movable relative to the lower chamber, allowing it to be moved away to expose the inner region of the lower chamber for servicing. This segmentation enables maintenance access without requiring complete disassembly of the clustered tool configuration.
2Ease of operation
If technicians disassemble parts of the cluster tool to access process modules for servicing, then access for maintenance is improved, but throughput is reduced due to time consumption
Solution Approach 1:
The upper chamber is designed with movable connections (hinge connects with hinge pins) that allow it to be rotated or pivoted away from the lower chamber. This dynamic design enables quick access to the lower chamber interior for servicing without requiring complete disassembly, thereby reducing maintenance time and minimizing impact on throughput.
Solution Approach 2:
The hinge connects with removable hinge pins are pre-configured to allow the upper chamber to be easily moved away. This preliminary preparation of the movable connection system enables technicians to quickly access the lower chamber for servicing without time-consuming disassembly procedures, thus maintaining higher throughput during maintenance operations.
3Ease of repair
If the upper chamber is made movable to expose the lower chamber for servicing, then ease of servicing is improved, but device complexity is increased
Solution Approach 1:
The chamber body is divided into upper and lower chambers with a defined interface. The upper chamber can be moved away from the lower chamber via hinge connects, providing ease of servicing. Kinematic pins are used at the interface to maintain precise alignment when chambers are mated, managing complexity through standardized alignment mechanisms.
Solution Approach 2:
The kinematic pins automatically self-align the upper chamber with the lower chamber when they are mated together. This self-aligning mechanism reduces the need for complex alignment procedures or additional adjustment mechanisms, thereby limiting the increase in device complexity while still enabling easy servicing.
4Manufacturing precision
If kinematic pins are used to self-align the upper chamber with the lower chamber, then alignment precision is improved, but device complexity is increased
Solution Approach 1:
The kinematic pins are designed to automatically self-align the upper chamber with the lower chamber through geometric constraints and contact surfaces. This self-aligning feature achieves high alignment precision without requiring external alignment tools or complex adjustment mechanisms, thereby limiting the increase in overall device complexity.
Solution Approach 2:
The kinematic pins replace complex mechanical alignment systems with a simpler geometric self-aligning mechanism. The pins use precise geometric features (spheroidal contacts, conical surfaces) to automatically establish correct alignment between chambers, achieving high manufacturing precision with minimal mechanical complexity.
Data Source
AI summary
A process module including a chamber body having a lower chamber and an upper chamber is provided. The lower chamber is configured to mate with the upper chamber along a diagonal interface. An electrode assembly having a substrate support is provided. The electrode assembly is coupled to the upper chamber. A hinge connect couples a first side of the lower chamber to a first side of the upper chamber. The upper chamber is configured to split and open along the diagonal interface and rotate about the hinge connect. The electrode assembly is configured to rotate with the upper chamber in a direction that is away from the lower chamber.