Split Coupling Member for Compact Fluid Device Sealing

Solution Overview

Problem

Conventional fluid device connecting structures require significant space and effort for assembly, making it difficult to ensure proper sealing in compact setups like semiconductor manufacturing, where multiple fluid devices are arranged in complex patterns.

Innovation Solution

A fluid device connecting structure featuring resin-made connection parts with specific grooves and a coupling member composed of split members and a deformable connecting band, allowing for easy and reliable coupling of fluid devices without the need for extensive space, using a jig to facilitate assembly and maintain sealing strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional coupling member with nut and split ring is used, then reliable sealing can be achieved, but large assembly space and complex assembly operations are required

Engineering Contradiction:

Improvesealing reliabilityVSAvoidassembly space

Core Design Contradiction:

ReliabilityVSArea of stationary object

Solution Approach 1:

The coupling member is divided into multiple split members that can be separately assembled around the connection parts. This segmentation allows the coupling member to be installed in limited spaces without requiring large assembly clearance, while still achieving reliable sealing through the coordinated action of all split members

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The split members are designed with flexible resin materials that can deform during assembly and maintain constant sealing pressure. This flexibility allows the coupling member to adapt to tight spaces and maintain reliable sealing without requiring large assembly space or complex adjustment operations

Inventive Principle:

Principle #30Flexible shells and thin films

2Reliability

If a conventional coupling member with nut and split ring is used, then reliable sealing can be achieved, but troublesome assembly operations and time consumption are required

Engineering Contradiction:

Improvesealing reliabilityVSAvoidassembly operation simplicity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The coupling member is divided into multiple split members that can be separately assembled around the connection parts. This segmentation allows the coupling member to be installed in limited spaces without requiring large assembly clearance, while still achieving reliable sealing through the coordinated action of all split members

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The split members are designed with flexible resin materials that can deform during assembly and maintain constant sealing pressure. This flexibility allows the coupling member to adapt to tight spaces and maintain reliable sealing without requiring large assembly space or complex adjustment operations

Inventive Principle:

Principle #30Flexible shells and thin films

3Volume of moving object

If connection parts are made compact for dense arrangement, then apparatus compactness is improved, but sealing strength may be compromised

Engineering Contradiction:

Improvefluid device sizeVSAvoidsealing strength

Core Design Contradiction:

Volume of moving objectVSReliability

Solution Approach 1:

The split members are designed with flexible resin materials that can deform during assembly and maintain constant sealing pressure. This flexibility allows the coupling member to adapt to tight spaces and maintain reliable sealing without requiring large assembly space or complex adjustment operations

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The resin material properties of the split members allow them to change their physical parameters (such as elasticity and deformation characteristics) in response to thermal expansion and contraction, maintaining constant sealing pressure and reliable sealing strength despite compact dimensions

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS8033579B2Fluid device connecting structure

Publication Date: 2011.10.11 CKD CORP

AI summary

For simply and reliably coupling first and second fluid devices, a fluid device connecting structure is arranged to couple first and second connection parts of the first and second fluid devices by use a coupling member by placing a resin seal member in seal grooves formed in the connection parts. The first connection part includes a first mounting groove for attachment jig and a first fitting groove provided between the first mounting groove and an end face of the first connection part to receive the coupling member. The second connection part includes a second mounting groove for the jig and a second fitting groove provided between the second mounting groove and an end face of the second connection part to receive the coupling member. The coupling member includes a plurality of split members each including a first projecting portion held in contact with an end-face-side inside surface of the first fitting groove and a second projecting portion held in contact with an end-face-side inside surface of the second fitting groove, the first and second projecting portions being arranged at a predetermined distance.