Scanning Probe Microscope Coarse Preliminary Scan
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Solution Overview
Problem
The existing scanning probe microscopes require significant time and effort for workers to align and observe minute objects due to the need for repeated alignment and imaging within restricted measurement ranges, especially when dealing with nanometer-sized objects, as the resolution for specifying the object's position is often insufficient.
Innovation Solution
A scanning probe microscope configuration that includes a preliminary measurement processor to acquire a coarse surface image of the sample by scanning at wider intervals, allowing for quicker identification of the object's existence, thereby reducing the overall observation time. This configuration can start from the central portion, scan simultaneously in both directions, or repeat scanning in a saw-tooth pattern, and includes a determination processor to automatically detect the object's presence, enabling automated main measurement only when the object is confirmed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the cantilever is scanned at predetermined intervals to acquire a surface image, then the surface image can be obtained within a measurement range, but the worker needs to repeatedly perform alignment to check the existence of the observation object, which prolongs the observation time
Solution Approach 1:
The patent performs preliminary scanning at wider intervals to acquire a coarse surface image before the main measurement. This preliminary action allows the worker to quickly identify whether the observation object exists within the measurement range, eliminating the need for repeated alignment operations during the main measurement process.
Solution Approach 2:
The patent divides the measurement process into two segments: preliminary measurement with wider scanning intervals and main measurement with predetermined scanning intervals. The preliminary measurement segment serves to locate the observation object, while the main measurement segment provides detailed surface imaging, thereby reducing overall observation time.
2Measurement precision
If the cantilever is scanned to acquire a surface image within a restricted measurement range, then the surface image can be obtained, but the worker cannot immediately identify minute observation objects without repeated alignment
Solution Approach 1:
The preliminary scanning at wider intervals creates a coarse surface image that provides a broad overview of the sample surface. This allows the worker to quickly identify the location of minute observation objects without needing to repeatedly align the cantilever, significantly improving ease of operation while maintaining the ability to perform detailed measurement.
Solution Approach 2:
The patent introduces a dimensional change in the scanning approach by first performing scanning at wider intervals (coarse resolution) to establish the overall layout, then performing scanning at predetermined intervals (fine resolution) for detailed measurement. This two-stage approach adds a strategic dimension to the measurement process, enabling easy identification of minute objects.
3Area of stationary object
If the surface image is captured with an optical microscope over a wide range, then the position of the observation object can be specified, but the resolution is insufficient for nanometer order size objects
Solution Approach 1:
The patent segments the imaging process into two stages: preliminary imaging with wider scanning intervals to cover a broad area, and main imaging with predetermined scanning intervals to provide high-resolution position specification. This segmentation allows the system to achieve both wide coverage and nanometer-order resolution for the observation object.
Solution Approach 2:
The preliminary scanning at wider intervals provides a coarse overview of the sample surface, allowing the worker to identify the general location of the observation object. Subsequently, the main measurement performs high-resolution scanning at predetermined intervals to precisely specify the position of the nanometer-order object, thereby overcoming the resolution limitation of single-stage imaging.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The preliminary measurement significantly shortens the observation time for minute objects by providing a coarse image quickly, reducing the burden on workers and allowing for automatic detection and focused main measurement on confirmed object locations.
Implementation Method 1
a light irradiator that emits light toward the cantilever and a photodetector that receives light reflected from the cantilever
Data Source
AI summary
Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.