Scanning Probe Microscope Detector Alignment via Zigzag Scan

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Solution Overview

Problem

In scanning probe microscopes, adjusting the position of the photodetector to correctly receive the reflected laser beam is time-consuming, especially when the beam is not initially incident on the detector, requiring manual or slow automatic adjustments.

Innovation Solution

The implementation of a scanning probe microscope with a detection unit having multiple light-receiving areas and a control unit that moves the detector obliquely to center the laser beam's spot on the light-receiving surface, utilizing a zigzag path to quickly adjust the position and ensure accurate alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the photodetector position is adjusted manually or by moving to every corner within movable range, then the reflected light can be brought to be incident on the photodetector, but the adjustment time becomes long

Engineering Contradiction:
Improvealignment accuracyVSAvoidadjustment time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs preliminary action by moving the photodetector along a predetermined path (zigzag pattern) to scan across the light-receiving surface before final alignment. This preliminary scanning identifies the optimal position where the reflected laser beam is received, allowing the system to quickly locate and lock onto the correct alignment without time-consuming manual adjustment or exhaustive corner-checking methods

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control unit receives feedback signals from the photodetector about the intensity of incident light and uses this information to determine the optimal position. By monitoring the light intensity detected at different positions during the zigzag scan, the system can identify when the maximum signal is achieved, indicating correct alignment, and stop the adjustment process there

Inventive Principle:
Principle #23Feedback

2Ease of operation

If the photodetector is moved to every corner within movable range to capture reflected light, then alignment can be achieved, but the process becomes time-consuming

Engineering Contradiction:
Improveautomatic alignment capabilityVSAvoidadjustment speed
Core Design Contradiction:
Ease of operationVSProductivity

Solution Approach 1:

The system transitions from static corner-checking to dynamic scanning by moving the photodetector along a zigzag path that covers the entire light-receiving surface. This dynamic approach allows the system to quickly sweep through possible positions and identify the optimal alignment point, significantly improving adjustment speed while maintaining automatic operation

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

Instead of checking only corner positions (0D or 1D approach), the system scans across the entire two-dimensional light-receiving surface by moving the photodetector along a zigzag trajectory. This two-dimensional scanning approach ensures comprehensive coverage of all possible alignment positions, enabling rapid identification of the optimal position without missing the correct alignment point

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method significantly reduces the time required for photodetector position adjustment by allowing the detector to capture the laser beam more efficiently, even when initially not incident, thereby streamlining the setup process.

Implementation Method 1

a detection unit 28 having a light-receiving surface 280 for receiving the laser beam LA reflected by the cantilever 10

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 2

the deflection or the change in the oscillation of the cantilever is converted into a change in the reflected light of the laser beam irradiated on the back surface of the cantilever

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11346856B2Scanning probe microscope and optical axis adjustment method in scanning probe microscope
Publication Date: 2022.05.31 SHIMADZU CORP
  • US11346856B2 patent drawing
  • US11346856B2 patent drawing
  • US11346856B2 patent drawing

AI summary

It is intended to save time for adjusting a position of a detection unit. In a position adjustment process of a detector, a control device moves the detector obliquely with respect to a boundary line partitioning photodiodes on a plane on which the detector moves and moves the detector so that the position of the center of gravity of a spot of a laser beam and the center of a light-receiving surface coincide in response to the incident of at least a part of the laser beam on the light-receiving surface.