Scanning Probe Microscope Distance Modulation for 3D Interaction Mapping

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Solution Overview

Problem

Conventional scanning probe microscopes face challenges in stably controlling the probe position and fully understanding three-dimensional interaction distributions between the probe and sample, particularly in liquid environments, due to non-monotonic interaction force variations and the complexity of feedback control, leading to incomplete data and potential sample damage.

Innovation Solution

A scanning probe microscope system that incorporates a displacement sensor, interaction detector, feedback control, distance modulation control, and three-dimensional distribution detection, allowing for stable probe position control and measurement of interaction distributions in a three-dimensional space by varying the probe-sample distance at a frequency higher than the feedback control response speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If feedback control is used to maintain constant interaction force, then probe position stability is improved, but three-dimensional interaction information is lost

Engineering Contradiction:
Improveprobe position stabilityVSAvoidthree-dimensional interaction information
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

The patent applies periodic distance modulation to the probe-sample distance during scanning. By modulating the distance at a specific frequency and detecting the interaction force variations, the system can reconstruct three-dimensional interaction information while maintaining stable feedback control. The periodic modulation allows extraction of interaction data at different depths without losing position stability.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The system dynamically adjusts the probe-sample distance by adding a modulation component to the feedback-controlled distance. This dynamic adjustment enables the probe to sample interaction forces at varying depths, capturing three-dimensional interaction distribution while the feedback control maintains overall position stability.

Inventive Principle:
Principle #15Dynamics

2Loss of information

If probe-sample distance is varied to obtain three-dimensional data, then measurement completeness is improved, but feedback control stability deteriorates

Engineering Contradiction:
Improvemeasurement completenessVSAvoidfeedback control stability
Core Design Contradiction:
Loss of informationVSReliability

Solution Approach 1:

By using periodic distance modulation at a controlled frequency, the system varies the probe-sample distance in a predictable, repeating pattern. This allows the feedback control system to anticipate and compensate for distance variations, maintaining stability while acquiring three-dimensional interaction data across different depths.

Inventive Principle:
Principle #19Periodic action

3Productivity

If distance modulation is performed at high frequency, then three-dimensional measurement speed is improved, but feedback control response capability is exceeded

Engineering Contradiction:
Improvemeasurement speedVSAvoidfeedback control response capability
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system uses periodic distance modulation at a frequency that is optimized for both measurement speed and feedback control capability. By selecting an appropriate modulation frequency, the system achieves fast three-dimensional measurement while ensuring the feedback control system can respond effectively to maintain stability.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables stable probe position control and comprehensive three-dimensional interaction measurement, reducing sample damage and increasing data accuracy, even in challenging environments like liquids, by modulating the probe-sample distance to detect interaction distributions within a scanning range.

Implementation Method 1

a displacement sensor which detects a displacement of the probe

Methodology Applied
Scientific EffectDisplacement detection:

Implementation Method 2

an interaction detecting section which detects an amount of interaction generated by an interaction between the probe and the sample and representing magnitude of the interaction based on a signal detected by the displacement sensor

Methodology Applied
Scientific EffectForce detection:

Implementation Method 3

a feedback control section which performs feedback control of a probe-sample distance as a distance between the probe and the sample such that the amount of interaction detected by the interaction detecting section is kept constant

Methodology Applied
Scientific EffectFeedback control: Feedback

Implementation Method 4

a distance modulation control section which performs distance modulation control to vary the probe-sample distance at a distance modulation frequency higher than a response speed of the feedback control

Methodology Applied
Scientific EffectDistance modulation:

Data Source

PatentEP2392930B1Scanning probe microscope
Publication Date: 2018.01.03 KANAZAWA UNIV
  • EP2392930B1 patent drawingFigure 1
  • EP2392930B1 patent drawingFigure 2
  • EP2392930B1 patent drawingFigure 3

AI summary

An atomic force microscope (AFM) (1) is one type of SPM, and detects a resonance frequency shift as an amount of interaction between a probe and a sample. The AFM (1) performs distance modulation control while performing feedback control of a probe-sample distance so as to keep the amount of interaction constant. The distance modulation control varies the probe-sample distance at a distance modulation frequency higher than a response speed of the feedback control. The AFM (1) further acquires the interaction amounts detected during the variation of the probe-sample distance by the distance modulation control while performing relative scanning between the probe and the sample, and detects a distribution of the interaction amounts in a three-dimensional space having a dimension within a scanning range and a thickness within a variation range of the probe-sample distance. The present invention thereby provides a scanning probe microscope (SPM) capable of preferably measuring the distribution of the interactions between the probe and the sample in the three-dimensional space while performing stable probe position control.