Scanning Probe Microscope Optical Axis Adjustment via Dynamic Imaging

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Solution Overview

Problem

Conventional scanning probe microscopes face difficulties in accurately performing optical axis adjustments due to high luminance of laser light spots, making it challenging for operators to properly grasp the position of cantilevers and laser light spots during manual adjustments.

Innovation Solution

A scanning probe microscope with an image capturing control unit that alternates between two image capturing conditions to create a composite image displaying both the laser light spot and cantilever clearly, allowing for accurate manual adjustments and enabling automatic optical axis adjustments by calculating and displaying adjustment amounts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single image capturing condition is used, then the image capturing speed is fast, but both the laser light spot and cantilever cannot be clearly observed simultaneously

Engineering Contradiction:
Improveposition detection accuracyVSAvoidimage capturing system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent divides the image capturing process into two separate conditions: a first condition optimized for capturing the laser light spot and a second condition optimized for capturing the cantilever. By segmenting the imaging task and alternating between these two conditions, the system can clearly observe both the laser spot position and cantilever position, thereby resolving the contradiction between measurement precision and system complexity.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If manual optical axis adjustment is performed, then the adjustment process is simple, but the accuracy and consistency are poor due to operator variations

Engineering Contradiction:
Improveoptical axis adjustment accuracyVSAvoidoperation complexity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent implements an automatic optical axis adjustment function that uses feedback from the captured images to calculate adjustment amounts and control the movement of the laser light source or light detector. This feedback mechanism eliminates operator variations and achieves consistent, accurate adjustments, resolving the contradiction between measurement precision and ease of operation.

Inventive Principle:
Principle #23Feedback

3Illumination intensity

If the laser light luminance is increased, then the laser spot visibility is improved, but the cantilever becomes harder to observe due to overexposure

Engineering Contradiction:
Improvelaser spot brightnessVSAvoidcantilever image information
Core Design Contradiction:
Illumination intensityVSLoss of information

Solution Approach 1:

The patent dynamically switches between two different image capturing conditions: one with higher laser light intensity for clear spot observation and another with lower intensity for clear cantilever observation. This dynamic adjustment of illumination conditions allows both the laser spot and cantilever to be clearly observed at different times, resolving the contradiction between illumination intensity and information loss.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Facilitates easy and accurate manual optical axis adjustments and reduces operator burden by automating the process, ensuring consistent results and reducing variations among operators.

Implementation Method 1

laser light emitted from the laser light source unit is reflected by a reflector to irradiate the cantilever, and a detector detects light reflected from the cantilever

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 2

A piezoelectric element that causes displacement by a voltage applied from the outside is used as a driving source

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 3

a cantilever provided with a probe is caused to be vibrated at a resonance point or the vicinity thereof

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS10126325B2Scanning probe microscope
Publication Date: 2018.11.13 SHIMADZU CORP
  • US10126325B2 patent drawing
  • US10126325B2 patent drawing
  • US10126325B2 patent drawing

AI summary

An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit.