Scanning Probe Microscope Dynamic Measurement Width Adjustment

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Solution Overview

Problem

Scanning probe microscopes face challenges in maintaining accurate measurement data due to signal drift caused by ambient temperature variations and creep phenomena, especially when measuring large-area samples over extended periods, leading to potential loss of signal and degradation of the signal-to-noise ratio.

Innovation Solution

A scanning probe microscope system that calculates a measurement width and offset value from prescanning operation data, adjusts these values based on temporal signal variations, and uses automatic gain control to correct signal drift, ensuring accurate data acquisition and amplification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the measurement width is increased to detect large convex-concave of the sample surface, then the signal coverage is improved, but the detection precision of fine convex-concave and the signal-to-noise ratio deteriorate

Engineering Contradiction:
Improvesignal coverageVSAvoiddetection precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The measurement width is made dynamically adjustable rather than fixed. The system automatically changes the measurement width based on the detected signal characteristics and surface features, allowing it to be wide for large convex-concave and narrow for fine details, thus resolving the contradiction between coverage and precision

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The measurement width parameter is changed adaptively based on signal intensity and surface topology. The system monitors signal characteristics and adjusts the measurement width parameter in real-time to optimize both coverage and detection precision for different regions of the sample surface

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the measurement width is decreased to improve the signal-to-noise ratio for fine convex-concave detection, then the detection precision is improved, but the risk of missing signals increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidsignal detection reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The measurement width is dynamically adjusted based on real-time signal characteristics. When weak signals are detected, the system automatically widens the measurement window to ensure signal capture, thereby maintaining both high signal-to-noise ratio and reliable signal detection

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system uses feedback from signal detection results to automatically adjust the measurement width. Detected signal strength and characteristics feed back to the control system, which then optimizes the measurement width to prevent signal loss while maintaining detection precision

Inventive Principle:
Principle #23Feedback

3Measurement precision

If manual setting of measurement width is used to optimize detection precision, then the signal-to-noise ratio is improved, but the operation complexity and time consumption increase

Engineering Contradiction:
Improvesignal detection accuracyVSAvoidoperation simplicity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The system performs automatic measurement width optimization without requiring manual intervention. The control system autonomously analyzes signal characteristics and adjusts measurement parameters, eliminating the need for operators to manually set measurement width while maintaining optimal detection precision

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system performs preliminary analysis of signal characteristics and automatically determines optimal measurement width before actual measurement begins. This preliminary automatic configuration eliminates the need for manual setting while ensuring optimal detection precision from the start

Inventive Principle:
Principle #10Preliminary action

4Measurement precision

If the measurement width is set to be small to increase the signal-to-noise ratio, then the detection precision is improved, but signal drift causes lost signals during extended measurement periods

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidmeasurement stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The measurement width and offset are dynamically adjusted during extended measurements to track and compensate for signal drift. The system continuously adapts these parameters based on real-time signal characteristics, maintaining both high signal-to-noise ratio and measurement stability over long periods

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system implements continuous feedback monitoring of signal drift and automatically adjusts measurement parameters accordingly. This feedback mechanism ensures that the measurement width remains optimal even as signals drift during extended measurement periods, preventing lost signals while maintaining detection precision

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively corrects signal drift and maintains high accuracy in measurement data acquisition, even with ambient temperature changes, preventing signal loss and improving the signal-to-noise ratio.

Implementation Method 1

a mode (hereinafter, appropriately referred to as a 'dynamic force mode (DFM)') in which a shape of a sample is measured using a variation in amplitude of a probe due to an intermittent force acting between the sample and the probe when a cantilever is forced to vibrate in the vicinity of a resonance frequency using a piezoelectric element or the like

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS9921241B2Scanning probe microscope and measurement range adjusting method for scanning probe microscope
Publication Date: 2018.03.20 HITACHI HIGH TECH SCIENCE CORP
  • US9921241B2 patent drawing
  • US9921241B2 patent drawing
  • US9921241B2 patent drawing

AI summary

A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.MW=(Smax−Smin)  Equation (1)OV=(MW/2)+Smin  Equation (2)