Scanning Probe Microscope Inclination Correction via Pixel Luminance

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Solution Overview

Problem

Scanning probe microscopes face challenges in accurately obtaining surface images of samples with inclined surfaces, as existing inclination correction methods fail to extract luminance pixels along straight lines parallel to both the X and Y directions, complicating sample placement and image correction.

Innovation Solution

A scanning probe microscope configuration that includes a cantilever, scanning processor, and inclination correcting processor, which allows for scanning in both X and Y directions and performs image processing to correct inclination by extracting pixels along a predetermined direction, enabling accurate inclination correction regardless of sample orientation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If inclination correction is performed using existing methods that extract luminance along straight lines parallel to X or Y directions, then correction can be performed for samples placed in standard orientations, but it becomes impossible to perform correction for samples with features inclined in arbitrary directions, complicating sample placement

Engineering Contradiction:

Improvecapability to perform inclination correctionVSAvoidsample placement simplicity

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent applies the dynamics principle by making the pixel extraction direction adjustable and adaptable. Instead of being fixed to only X or Y directions, the system can dynamically select the optimal extraction direction based on the sample's orientation and feature alignment, thereby resolving the contradiction between correction capability and placement simplicity

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent changes the parameter of pixel extraction direction from fixed (parallel to X or Y) to variable (arbitrary angle). This parameter change enables the system to adapt to samples with features in any orientation, eliminating the need for complex sample placement while maintaining correction effectiveness

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If the cantilever is irradiated with a light beam to detect bending for obtaining surface images, then surface topography can be measured, but variations in luminance appear on inclined surfaces, reducing measurement precision

Engineering Contradiction:

Improvesurface image accuracyVSAvoidluminance variation on inclined surfaces

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the direct interpretation of raw luminance data with an image processing system that performs inclination correction. Instead of relying on perfect optical measurement, the system uses computational methods to calculate and remove luminance variations caused by surface inclination, thereby restoring measurement precision

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements a feedback mechanism where the extracted luminance profile along the inclined surface is used to calculate the inclination angle, and this calculated inclination information is then fed back to correct the luminance variations in the surface image, improving measurement accuracy

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration simplifies sample placement by allowing inclination correction based on luminance extraction along any direction, improving the accuracy of surface image correction and facilitating easier observation of the corrected images.

Implementation Method 1

an optical irradiation unit that irradiates the cantilever with a light beam and an optical detection unit that receives a reflected beam from the cantilever

Methodology Applied

Scientific EffectOptical reflection: Reflection

Data Source

PatentUS10564183B2Scanning probe microscope and surface image correction method

Publication Date: 2020.02.18 SHIMADZU CORP

AI summary

An inclination correcting processor performs an image process for correcting inclination of a surface image to a Z direction intersecting an X direction and a Y direction on the surface image of a sample which has been acquired from scanning by a scanning processor. The inclination correcting processor extracts a plurality of pixels from the surface image on a straight line along a predetermined direction and corrects inclination of the surface image based on luminance of the extracted pixels. In a case where correction is performed on the surface image of the sample having a flat surface at least in the one direction (P direction) intersecting the X direction and the Y direction, the inclination correcting processor performs the image process such that the predetermined direction (a direction of a straight line 28) substantially matches the one direction (P direction).