Scanning Probe Microscope Markers for Precise ROI Alignment
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Solution Overview
Problem
Scanning probe microscopes face challenges in aligning regions of interest with magnifying observation devices due to marker position deviations and sample deterioration during observation, particularly when dealing with narrow regions of interest.
Innovation Solution
A scanning probe microscope design that forms markers with enhanced edge contrast and aspect ratios matching the observation visual field, allowing for improved visibility and alignment without the need for precise electric stages or special probe arrays, thereby minimizing sample deterioration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If markers are formed at distant positions from regions of interest, then the regions of interest are protected from damage, but the alignment precision between scanning probe microscope and magnifying observation processing device deteriorates
Solution Approach 1:
The patent applies the principle of visual contrast enhancement by forming markers with scratch scars that create strong edge contrast. The markers are designed to be visually distinct from the sample surface through scratch patterns, enabling easy detection and alignment in the magnifying observation processing device without requiring the markers to be placed at distant positions. This resolves the contradiction by allowing markers to be placed close to regions of interest while maintaining both sample protection and alignment precision.
2Device complexity
If markers are formed with simple patterns, then the marker formation process is simplified, but the visibility of markers in broad and high-speed observation deteriorates
Solution Approach 1:
The patent enhances marker visibility by creating scratch scar patterns that produce strong edge contrast. The scratch patterns generate optical edges that are highly visible under magnifying observation, effectively increasing the visual intensity of markers without complicating the formation process. This resolves the contradiction by providing high-visibility markers through a relatively simple scratch-based formation method.
Solution Approach 2:
The patent transitions from considering only the positional aspect of markers to incorporating their visual appearance in the observation dimension. By designing markers with specific scratch patterns that create edge contrast, the invention adds a visual dimension to marker effectiveness, enabling high-speed and broad observation with improved marker detectability.
3Measurement precision
If alignment is performed by observing narrow regions of magnifying observation processing device, then precise alignment is achieved, but the regions of interest deteriorate during alignment
Solution Approach 1:
The patent applies preliminary action by forming markers with enhanced visibility characteristics before the alignment process. These pre-formed markers with strong edge contrast enable the magnifying observation processing device to quickly and accurately locate regions of interest without requiring prolonged observation or repeated scanning. This reduces the total observation time and minimizes sample deterioration while achieving precise alignment.
Solution Approach 2:
The scratch scar markers create strong visual contrast that enables rapid detection and alignment. This high-visibility marker design allows the system to achieve precise alignment through broader region observation rather than narrow region scanning, thereby reducing the time the electron beam is exposed to the sample and minimizing deterioration effects.
Data Source
AI summary
A scanning probe microscope is designed to improve visibility of a marker in broad and high-speed observation by a magnifying observation processing device. A marker is disposed so that an aspect ratio of an observation visual field of the magnifying observation processing device is matched with an observation angle in a circumference centering on a region of interest. Further, the marker is formed by scratch scars of multiple lines, for example, to enhance edge contrast.