Scanning Probe Microscope Noise Determination via Dynamic Scanning

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Solution Overview

Problem

Conventional scanning probe microscopes are susceptible to external noise sources like floor vibrations and air conditioning airflow, which can result in the inclusion of non-existent images in acquired images, making it difficult to correctly observe the sample surface.

Innovation Solution

A scanning probe microscope equipped with a noise determination processing unit that changes scanning conditions such as speed or range to differentiate between actual sample surface signals and noise signals, allowing for the correct identification and removal of noise from the output signal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If high resolution scanning is performed to acquire detailed surface images, then measurement precision is improved, but susceptibility to external noise increases

Engineering Contradiction:
Improvesurface image resolutionVSAvoidexternal noise susceptibility
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies dynamics by varying scanning conditions (scanning speed, scanning range) during the imaging process. The control unit changes these parameters to acquire multiple images under different conditions, then synthesizes them to distinguish real surface features from noise patterns. This dynamic approach allows the system to maintain high resolution while reducing noise susceptibility through conditional variation.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements parameter changes by modifying scanning speed and scanning range as variable parameters. By acquiring images at different scanning speeds and ranges, the system creates a set of images with varying characteristics. Real surface features remain consistent across different parameters, while noise patterns change, enabling differentiation and noise removal through comparison.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If multiple scanning conditions are used to identify noise, then noise determination accuracy is improved, but scanning time increases

Engineering Contradiction:
Improvenoise determination accuracyVSAvoidscanning time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies partial action by acquiring multiple images under different scanning conditions rather than performing exhaustive measurements. The control unit strategically selects different scanning speeds and ranges to obtain sufficient data for noise identification without unnecessary redundancy. This partial approach achieves adequate noise determination accuracy while minimizing additional scanning time.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The patent implements feedback through the control unit comparing images acquired under different scanning conditions. The system analyzes variations between images to determine whether features represent real surface characteristics or noise. This feedback mechanism enables automatic noise identification and removal, improving determination accuracy while managing scanning time through efficient comparison algorithms.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS11415596B2Scanning probe microscope and analysis method
Publication Date: 2022.08.16 SHIMADZU CORP
  • US11415596B2 patent drawing
  • US11415596B2 patent drawing
  • US11415596B2 patent drawing

AI summary

A scanning probe microscope 1 is provided with a control unit 15. The control unit 15 includes a signal acquisition processing unit 151, an image acquisition processing unit 152, a scanning condition change processing unit 154, a scanning processing unit 155, and a noise determination processing unit 156. In the scanning probe microscope 1, when removing noise included in a surface image of a sample, the scanning condition change processing unit 154 changes a scanning condition. And, the signal acquisition processing unit 151 acquires an output signal from a detection unit 12. The image acquisition processing unit 152 acquires a surface image of a sample S based on the output signal. The noise determination processing unit 156 determines whether or not noise is inclined in the output signal contains noise based on the change in the output signal or the change in the surface image of the sample S when the scanning condition is changed by the scanning condition change processing unit 154. Therefore, if noise is included in the output signal, it is possible to correctly determinate the fact.