Scanning Probe Microscope Optical Axis Adjustment
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Solution Overview
Problem
Existing scanning probe microscopes require manual and skilled optical axis adjustment, which can degrade microscope resolution and complicate miniaturization, especially when obliquely emitting laser light, and is time-consuming.
Innovation Solution
A scanning probe microscope with an objective lens that automatically adjusts the optical axis by detecting the spot position and position of the cantilever using a controller, which geometrically calculates and moves the cantilever to ensure accurate reflection of detection light, eliminating the need for manual adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a beam splitter is disposed on the optical axis of the optical microscope to enable direct viewing of laser light position, then optical axis adjustment is facilitated, but the resolution performance of the microscope is degraded
Solution Approach 1:
The patent introduces a camera as an intermediary device to capture the position of laser light on the cantilever. The camera records the light position, and the controller automatically processes this information to adjust the optical axis, eliminating the need for a beam splitter in the optical path while maintaining microscope resolution.
Solution Approach 2:
The patent replaces the manual optical adjustment mechanism with an automated system. The camera captures light position data, the controller processes this data, and the system automatically adjusts the optical axis, substituting manual mechanical adjustment with an automated optical-mechanical system that preserves resolution.
2Ease of operation
If manual optical axis adjustment is performed by skilled operators, then the laser light position can be adjusted, but the process is time-consuming and requires specialized skills
Solution Approach 1:
The system performs self-adjustment through automation. The camera automatically captures the laser light position on the cantilever, the controller processes this data, and the system automatically adjusts the optical axis without requiring operator intervention or specialized skills, making the system self-sufficient.
Solution Approach 2:
The patent implements a feedback control loop where the camera continuously monitors the laser light position on the cantilever, the controller processes this feedback information, and automatically adjusts the optical axis to maintain optimal alignment, eliminating manual adjustment time.
3Measurement precision
If the laser light is obliquely emitted on the cantilever, then the measurement capability is improved, but the spot position checked with the optical microscope does not match the actual emission position
Solution Approach 1:
The camera acts as an intermediary that directly observes the actual laser light spot position on the cantilever at the point of emission. This allows the system to accurately track the oblique light position without relying on optical microscope viewing, which suffers from positional mismatch due to the oblique angle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and automatic optical axis adjustment, improving resolution and simplifying the apparatus, reducing the complexity and time required for alignment, and facilitating miniaturization.
Implementation Method 1
a cantilever provided with a reflecting surface for reflecting light
Implementation Method 2
an objective lens provided at a position facing the cantilever for capturing an image of a vicinity of the cantilever
Implementation Method 3
a detector that receives the detection light reflected on the reflecting surface of the cantilever and detects a position and a displacement of the cantilever
Implementation Method 4
an optical lever type SPM, in which laser light is emitted on the back surface of the tip of the cantilever, and reflecting light thereof is detected
Data Source
AI summary
A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion.