Scanning Probe Microscope Optical Axis Adjustment

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Solution Overview

Problem

Manual optical axis adjustments in scanning probe microscopes are cumbersome due to the small size of cantilevers, requiring precise micron-level adjustments which are difficult to perform accurately.

Innovation Solution

A scanning probe microscope equipped with an optical system, imaging unit, image processing unit, optical axis adjustment unit, and a sample holder with a mirror and magnet, allowing for automatic optical axis adjustment without placing a high-reflectance sample directly on the mirror, thereby simplifying the process and preventing mirror damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual optical axis adjustment is performed, then adjustment precision is improved, but operation complexity increases

Engineering Contradiction:

Improveoptical axis adjustment precisionVSAvoidoperation simplicity

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The system performs optical axis adjustment automatically without requiring manual intervention. The imaging unit captures images of the cantilever tip and laser spot, the image processing unit calculates position deviations, and the optical axis adjustment unit autonomously adjusts the laser optical axis based on these calculations, making the system self-sufficient for the adjustment task.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical adjustment with an automated system combining imaging, image processing, and computer-controlled adjustment. The mechanical manual adjustment process is substituted by an optical-mechanical-electrical integrated system that uses cameras and computer algorithms to achieve precise alignment.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Difficulty of detecting and measuring

If high-reflectance sample is placed on mirror for adjustment, then adjustment visibility is improved, but mirror damage risk increases

Engineering Contradiction:

Improvelaser spot detection easeVSAvoidmirror damage risk

Core Design Contradiction:

Difficulty of detecting and measuringVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a mirror as an intermediary reflective element positioned between the laser source and the cantilever. This mirror serves as a mediator that reflects the laser light onto the cantilever for optimal alignment visibility, while being positioned and designed to protect against direct sample contact and potential damage.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system performs optical axis adjustment using the mirror and cantilever configuration before actual sample measurement begins. The mirror is positioned in advance to enable laser spot imaging, and the adjustment is completed preliminarily so that when the sample is placed on the sample stage, the optical axis is already correctly aligned, eliminating the need for high-reflectance samples during adjustment.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy and precise optical axis adjustment without the need for high-reflectance samples, ensuring accurate laser alignment and protecting the mirror from damage.

Implementation Method 1

an imaging unit configured to image a range including a position of a tip end of the cantilever when adjusting an optical axis of the laser light

Methodology Applied

Scientific EffectLight reflection: Reflection

Implementation Method 2

an optical system configured to emit laser light onto the cantilever and detect the laser light reflected by the cantilever

Methodology Applied

Scientific EffectLaser: Laser

Implementation Method 3

detect the laser light reflected by the cantilever

Methodology Applied

Scientific EffectLight reflection: Reflection

Implementation Method 4

the sample holder further includes a magnet arranged below the mirror... fix the sample stage with the magnet

Methodology Applied

Scientific EffectMagnetism: Magnetism

Data Source

PatentUS11519936B2Scanning probe microscope and scanning probe microscope optical axis adjustment method

Publication Date: 2022.12.06 SHIMADZU CORP

AI summary

A scanning probe microscope is provided with a cantilever having a probe at a tip end thereof, an optical system for emitting laser light onto the cantilever and detecting the laser light reflected by the cantilever, an imaging unit for imaging a range including a position of the tip end of the cantilever when adjusting an optical axis of the laser light, an image processing unit for detecting a position of the tip end of the probe and a position of a spot of the laser light from an image generated by the imaging unit, an optical axis adjustment unit for adjusting the optical axis of the laser light based on the detected positions, and a sample holder for holding a sample. The sample holder includes a mirror.