Scanning Probe Microscope Non-Perpendicular Scanner Overhang Measurement
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Solution Overview
Problem
Conventional scanning probe microscopes struggle to precisely analyze samples with overhang surface structures due to limitations in probe design, leading to incorrect data collection and high manufacturing costs.
Innovation Solution
The scanning probe microscope employs a first probe and scanner configuration where the probe movement is non-perpendicular to the sample plane movement, allowing precise scanning of overhang structures without the need for specialized, costly probe designs, and optionally includes a rotating device or actuators to adjust the angle between probe and sample planes for optimal data collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional probe design is used, then the manufacturing cost is reduced and yield is improved, but the probe cannot accurately scan inclined surfaces of overhang structures
Solution Approach 1:
The patent applies dynamics by making the probe scanning path adjustable rather than fixed. The scanner can change the scanning direction angle to match the inclination of sample surfaces, allowing the system to adapt to different surface geometries dynamically during measurement without requiring specialized probes for each surface type.
Solution Approach 2:
The patent changes the scanning parameter (angle of the scanning path relative to the sample surface) to optimize measurement accuracy. By adjusting this parameter according to the sample's surface inclination, the system achieves accurate measurement of overhang structures using conventional probes, resolving the contradiction between measurement precision and manufacturing ease.
2Measurement precision
If the probe moves perpendicular to the sample plane, then the scanning path is simple, but inclined surfaces cannot be scanned correctly
Solution Approach 1:
The scanner is designed with dynamic adjustability to change the scanning path angle relative to the sample plane. This dynamic capability allows the system to transition from simple perpendicular scanning to angled scanning that matches inclined surfaces, achieving accurate data collection without requiring complex fixed multi-axis mechanisms.
Solution Approach 2:
The patent introduces an angular dimension to the scanning path configuration. Instead of being constrained to a single fixed angle (perpendicular or parallel), the scanning path can be rotated to match the inclination of the sample surface, adding a degree of freedom that enables accurate measurement of overhang structures while maintaining relatively simple scanner mechanics.
3Measurement precision
If a specialized probe with protrusion is used, then correct data for overhang structures can be obtained, but manufacturing cost increases and yield decreases
Solution Approach 1:
Instead of modifying the probe tip structure (adding protrusions or complex geometries), the patent inverts the approach by modifying the scanning path angle. This inversion allows conventional probes to accurately measure overhang structures by changing the measurement geometry rather than the probe geometry, thereby avoiding increased manufacturing costs and improved yield.
Solution Approach 2:
The patent creates a virtual adaptation by copying the function of a specialized probe through software/control adjustments. Rather than physically modifying the probe, the system copies the effect of a specialized probe by adjusting the scanning path angle to match the sample geometry, achieving the same measurement accuracy with conventional hardware.
Data Source
AI summary
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.