SPM Probe Alignment via Field Gradient Detection

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Solution Overview

Problem

The challenge lies in accurately aligning a Scanning Probe Microscopy (SPM) probe with a pointed sample, particularly for Atom Probe Tomography (APT), due to the nanoscale dimensions and shape distortions of the sample tip, which result in severe distortions in 3D reconstructions.

Innovation Solution

The method involves scanning an area above the sample tip in a contactless mode while inducing an electric and/or magnetic field, using EFM or MFM to detect field gradients, and iteratively decreasing distance to precisely align the probe with the sample tip's apex area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional SPM alignment methods are used, then the alignment process is simple, but the alignment precision is insufficient due to nanoscale dimensions and shape distortions

Engineering Contradiction:
Improvealignment precisionVSAvoidalignment process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces an electric or magnetic field as an intermediary to enable indirect detection of the sample tip position. By applying a field around the sample tip and detecting its gradient with the SPM probe, the system can locate the nanoscale tip apex without direct mechanical contact or visual alignment, thereby achieving high precision alignment while managing the complexity through field-based mediation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces mechanical alignment methods with field-based detection. Instead of using mechanical contact or optical alignment systems, the invention uses electric or magnetic fields to sense the tip position and gradient, substituting mechanical interaction with electromagnetic interaction to achieve superior alignment precision at the nanoscale

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If the SPM probe is brought close to the sample tip for precise alignment, then the alignment accuracy improves, but the risk of tip damage or contamination increases

Engineering Contradiction:
Improvetip position detection accuracyVSAvoidtip damage or contamination risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The electric or magnetic field serves as a non-contact intermediary that allows the probe to detect tip position and gradient without physical contact. This eliminates mechanical damage risks while maintaining high detection accuracy, as the field interaction occurs at a safe distance from the delicate nanoscale tip structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces mechanical contact-based detection with field-based detection. By using electric or magnetic field gradients to sense tip position, the system achieves precise localization without the probe physically touching the sample tip, thereby preventing contamination and damage to both the sample and probe

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If multiple scanning iterations are performed to achieve precise alignment, then the alignment accuracy improves, but the time required for alignment increases

Engineering Contradiction:
Improveprobe alignment accuracyVSAvoidalignment time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent implements a feedback mechanism where the detected field gradient information is used to guide subsequent scanning iterations. The system measures the gradient, determines the tip position, adjusts the scan parameters based on this information, and repeats the process, creating a closed-loop feedback system that converges to high-precision alignment efficiently

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent performs preliminary field application and gradient detection before the final alignment scan. By pre-establishing the field around the sample tip and characterizing its gradient properties in advance, the system prepares the measurement environment to enable faster and more accurate alignment in subsequent iterations, reducing overall alignment time

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for accurate alignment of the SPM probe with the sample tip, enabling precise imaging and reducing distortions in 3D reconstructions by effectively determining the tip's position and shape, applicable to both APT and other pointed samples.

Implementation Method 1

An electrostatic field may be induced by a DC bias voltage applied to the tip

Methodology Applied
Scientific EffectElectrostatic field: Electric Field

Implementation Method 2

a static magnetic field by a magnetic tip

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 3

an 'electric and magnetic' field is in fact an electromagnetic field induced for example by an AC bias applied to the tip

Methodology Applied
Scientific EffectElectromagnetic field: Electromagnetic Induction

Implementation Method 4

As the tip of the probe is scanned across a surface, the cantilever moves under the influence of the scanning probe's interaction with the surface

Methodology Applied
Scientific EffectCantilever deflection:

Data Source

PatentUS11549963B2Method and apparatus for aligning a probe for scanning probe microscopy to the tip of a pointed sample
Publication Date: 2023.01.10 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US11549963B2 patent drawing
  • US11549963B2 patent drawing
  • US11549963B2 patent drawing

AI summary

Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.