SPM Probe Landing Using Optical Distance Calibration
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Solution Overview
Problem
Existing scanning probe microscope (SPM) landing methods are inefficient and time-consuming, particularly when the initial separation between the probe tip and the substrate varies, relying on user proficiency and feedback control during coarse motion.
Innovation Solution
A method and system that utilize a calibration routine to determine a reference distance and deviation, allowing a single coarse translation step without feedback control, followed by a fine translation stage, to quickly and reliably bring the probe tip to a working separation, using optical detection for precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If automated coarse motion with feedback control is used, then landing reliability is improved, but landing speed is limited
Solution Approach 1:
The system performs preliminary calibration to determine a reference distance that corresponds to a safe transition point during coarse motion. This pre-determined reference distance allows the system to execute coarse translation without continuous feedback control, thereby improving landing speed while maintaining reliability through the predetermined safety margin.
2Speed
If manual manipulation is used in coarse motion, then landing speed can be rapid for proficient users, but landing reliability depends on user proficiency
Solution Approach 1:
The system replaces manual user manipulation with automated control based on predetermined reference distances. The system serves itself by using the calibrated reference distance to automatically determine when to switch from coarse to fine motion, eliminating dependency on user proficiency while maintaining rapid landing speeds.
3Adaptability or versatility
If the initial separation distance varies, then adaptability to different substrates is improved, but landing time increases due to feedback control requirements
Solution Approach 1:
The system changes the control parameter from continuous feedback control to a discrete reference distance threshold. By comparing the real-time distance measurement against the predetermined reference distance, the system can adapt to varying initial separations and substrate conditions without requiring time-consuming continuous feedback control, thus reducing landing time while maintaining adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly reduces landing time and improves efficiency by determining the safe coarse translation distance based on measured optical distance and reference distance, enabling rapid and reliable landing across varying substrate conditions.
Implementation Method 1
measuring an initial optical distance, indicative of the initial separation, using a detector
Data Source
AI summary
The present disclosure relates to a method of operating an SPM system including a landing procedure. The landing procedure comprises a first landing stage including a first translation over a first actuation distance by a coarse translation means to bring a probe tip held by an SPM head from an initial separation from a substrate to be probed to a second, more proximal, separation as defined by a characteristic transitional response of the probe tip in proximity to the substrate. Following the first stage a second translation is applied, over a second actuation distance by a fine translation means under feedback control to bring the probe tip to a working separation. Prior to applying the first (coarse) actuation distance an initial optical distance is determined which is indicative of the initial separation, using a detector, preferably a mark sensor. The measured initial optical distance is related to a reference distance so as to determine a deviation. The first actuation distance corresponds the reference distance and the deviation. The disclosure also relates to an SPM system and software product arranged to implement the landing method.