SPM Probe Assessment Using Tapered Sample Width Thresholds
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Solution Overview
Problem
Existing SPMs face increased arithmetic processing loads when assessing probe wear due to the need to measure multiple combinations of distance and width from projection parts, leading to inaccurate observations.
Innovation Solution
A method to assess probe wear by measuring the width of known sample features, such as projection or groove parts, at a predetermined distance and comparing it to a threshold value, determining probe satisfaction based on these measurements without requiring multiple combination calculations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple combinations of distance and width are measured to assess probe wear, then measurement precision is improved, but arithmetic processing amount increases
Solution Approach 1:
The patent extracts only the essential measurement parameter (width at a specific distance) needed for probe assessment, discarding the need to measure multiple combinations of distance and width. This selective extraction maintains measurement precision while significantly reducing arithmetic processing requirements.
Solution Approach 2:
Instead of performing complete comprehensive measurements of multiple distance-width combinations, the patent applies partial action by measuring only at one specific distance position. This partial measurement approach provides sufficient assessment accuracy without the excessive processing burden of full comprehensive measurement.
2Reliability
If multiple combinations of distance and width are measured to assess probe wear, then reliability of assessment is improved, but ease of operation deteriorates
Solution Approach 1:
The method extracts the critical assessment information from a single width measurement at a predetermined distance, eliminating the need for users to perform multiple measurements and complex data analysis. This maintains assessment reliability while dramatically improving ease of operation.
3Measurement precision
If multiple combinations of distance and width are measured, then measurement precision is improved, but time consumption increases
Solution Approach 1:
The patent performs only the necessary partial measurement (single width measurement at specific distance) required for reliable probe assessment, avoiding time-consuming comprehensive measurements of multiple parameters. This achieves sufficient precision while minimizing time loss.
Data Source
AI summary
A method of assessing a probe by measuring a known sample whose shape is known with the probe in an electronic microscope, the known sample having a projection part on a surface thereof, and the projection part having a shape tapered toward a vertex thereof, the method comprising a step of measuring circle equivalent radius of the projection part, a step of comparing the circle equivalent radius with a first threshold value, and a step of determining that the probe is satisfactory when the width is less than the first threshold value, and a step of determining that the probe is unsatisfactory when the width is equal to or greater than the first threshold value.